Granted Patent
Utility
US 6,828,569 · App. 09/988,391
Lithographic projection apparatus, device manufacturing method and device manufactured thereby
Inventors:
Willem Van Schaik, Bastiaan Mertens, Hans Meiling, Norbertus Benedictus Koster
Patented Case
View Patent ↗
Granted: Dec 7, 2004
Filed: Nov 19, 2001
Inventors
Willem Van Schaik
Bastiaan Mertens
Hans Meiling
Norbertus Benedictus Koster
Assignee (at issue)
ASML NETHERLANDS B.V.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.