IP Library › Granted Patent US 6,829,022
Granted Patent Utility
US 6,829,022 · App. 10/327,980

Chuck for exposure apparatus

Inventor: Yong Hun Kim
Patented Case View Patent ↗
Granted: Dec 7, 2004 Filed: Dec 26, 2002
Inventor
Yong Hun Kim
Assignee (at issue)
LG Philips LCD Co., Ltd.

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Quick Facts
Patent No.
US 6,829,022
App. No.
10/327,980
Filed
2002-12-26
Granted
2004-12-07
Kind
B2