Granted Patent
Utility
US 6,830,503 · App. 10/368,275
Catalyst/oxidizer-based CMP system for organic polymer films
Inventor:
Steven Grumbine
Patented Case
View Patent ↗
Granted: Dec 14, 2004
Filed: Feb 18, 2003
Inventor
Steven Grumbine
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.