Granted Patent
Utility
US 6,830,664 · App. 10/212,293
Cluster tool with a hollow cathode array
Inventor:
Andrew Clarke
Patented Case
View Patent ↗
Granted: Dec 14, 2004
Filed: Aug 5, 2002
Inventor
Andrew Clarke
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.