Granted Patent
Utility
US 6,830,991 · App. 10/187,825
Method of manufacturing a semiconductor device including a gettering operation
Inventor:
Kanta Saino
Patented Case
View Patent ↗
Granted: Dec 14, 2004
Filed: Jul 2, 2002
Inventor
Kanta Saino
Assignees (at issue)
NEC CORPORATION
HITACHI, LTD.
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.