Granted Patent
Utility
US 6,831,010 · App. 09/548,014
Method and depositing a layer
Inventors:
Knut Beekman, Paul Rich, Claire Wiggins
Patented Case
View Patent ↗
Granted: Dec 14, 2004
Filed: Apr 12, 2000
Inventors
Knut Beekman
Paul Rich
Claire Wiggins
Assignee (at issue)
Trikon Technologies Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.