IP Library › Granted Patent US 6,831,347
Granted Patent Utility
US 6,831,347 · App. 08/932,228

Shallow trench isolation using low dielectric constant insulator

Inventors: Klaus Schuegraf, Aftab Ahmad
Patented Case View Patent ↗
Granted: Dec 14, 2004 Filed: Sep 17, 1997
Inventors
Klaus Schuegraf
Aftab Ahmad
Assignee (at issue)
Micron Technology, Inc.

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Quick Facts
Patent No.
US 6,831,347
App. No.
08/932,228
Filed
1997-09-17
Granted
2004-12-14
Kind
B1