Granted Patent
Utility
US 6,831,390 · App. 10/099,464
Microelectromechanical system with stiff coupling
Inventors:
Samuel Lee Miller, Stephen Barnes, Murray Steven Rodgers
Patented Case
View Patent ↗
Granted: Dec 14, 2004
Filed: Mar 14, 2002
Inventors
Samuel Lee Miller
Stephen Barnes
Murray Steven Rodgers
Assignee (at issue)
MEMX, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.