Granted Patent
Utility
US 6,832,863 · App. 10/458,719
Substrate treating apparatus and method
Inventors:
Kenji Sugimoto, Minobu Matsunaga, Masakazu Sanada, Katsushi Yoshioka, Kaoru Aoki, Moritaka Yano, Satoshi Yamamoto, Tsuyoshi Mitsuhashi, Takashi Nagao, Mitsumasa Kodama
Patented Case
View Patent ↗
Granted: Dec 21, 2004
Filed: Jun 9, 2003
Inventors
Kenji Sugimoto
Minobu Matsunaga
Masakazu Sanada
Katsushi Yoshioka
Kaoru Aoki
Moritaka Yano
Satoshi Yamamoto
Tsuyoshi Mitsuhashi
Takashi Nagao
Mitsumasa Kodama
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.