Granted Patent
Utility
US 6,832,888 · App. 10/278,188
Molecular pump for forming a vacuum
Inventors:
Takashi Kabasawa, Manabu Nonaka, Tooru Miwata
Patented Case
View Patent ↗
Granted: Dec 21, 2004
Filed: Oct 22, 2002
Inventors
Takashi Kabasawa
Manabu Nonaka
Tooru Miwata
Assignee (at issue)
BOC Edwards Technologies Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.