Granted Patent
Utility
US 6,833,232 · App. 10/338,506
Micro-pattern forming method for semiconductor device
Inventor:
Cheol Soo Park
Patented Case
View Patent ↗
Granted: Dec 21, 2004
Filed: Jan 8, 2003
Inventor
Cheol Soo Park
Assignee (at issue)
Dongbu Electronics, Co. Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.