Granted Patent
Utility
US 6,833,725 · App. 10/600,800
Semiconductor characteristic evaluation apparatus
Inventors:
Shin-ichi Ohkawa, Masakazu Aoki
Patented Case
View Patent ↗
Granted: Dec 21, 2004
Filed: Jun 19, 2003
Inventors
Shin-ichi Ohkawa
Masakazu Aoki
Assignee (at issue)
Semiconductor Technology Academic Research Center
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.