Granted Patent
Utility
US 6,834,656 · App. 09/864,003
Plasma process for removing polymer and residues from substrates
Inventors:
Han Qingyuan, Carlo Waldfried, Orlando Escorcia, Gary A. Dahrooge, Ivan L. Berry, III
Patented Case
View Patent ↗
Granted: Dec 28, 2004
Filed: May 23, 2001
Inventors
Han Qingyuan
Carlo Waldfried
Orlando Escorcia
Gary A. Dahrooge
Ivan L. Berry, III
Assignee (at issue)
Axcelis Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.