Granted Patent
Utility
US 6,835,508 · App. 10/215,227
Large-area membrane mask and method for fabricating the mask
Inventors:
Jörg Butschke, Albrecht Ehrmann, Ernst Haugeneder, Frank-Michael Kamm, Florian Letzkus, Hans Loschner, Reinhard Springer
Patented Case
View Patent ↗
Granted: Dec 28, 2004
Filed: Aug 8, 2002
Inventors
Jörg Butschke
Albrecht Ehrmann
Ernst Haugeneder
Frank-Michael Kamm
Florian Letzkus
Hans Loschner
Reinhard Springer
Assignees (at issue)
Infineon Technologies AG
IMS-Ionen Mikrofabrikationas Systeme
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.