Granted Patent
Utility
US 6,835,660 · App. 10/697,335
Method of manufacturing semiconductor device having metal alloy interconnection that has excellent EM lifetime
Inventor:
Tetsuo Usami
Patented Case
View Patent ↗
Granted: Dec 28, 2004
Filed: Oct 31, 2003
Inventor
Tetsuo Usami
Assignee (at issue)
OKI ELECTRIC INDUSTRY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.