IP Library Granted Patent US 6,835,660
Granted Patent Utility
US 6,835,660 · App. 10/697,335

Method of manufacturing semiconductor device having metal alloy interconnection that has excellent EM lifetime

Inventor: Tetsuo Usami
Patented Case View Patent ↗
Granted: Dec 28, 2004 Filed: Oct 31, 2003
Inventor
Tetsuo Usami
Assignee (at issue)
OKI ELECTRIC INDUSTRY CO., LTD.

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Quick Facts
Patent No.
US 6,835,660
App. No.
10/697,335
Filed
2003-10-31
Granted
2004-12-28
Kind
B2