Granted Patent
Utility
US 6,835,666 · App. 10/291,070
Method for fabricating a mask for semiconductor structures
Inventor:
Martin Popp
Patented Case
View Patent ↗
Granted: Dec 28, 2004
Filed: Nov 8, 2002
Inventor
Martin Popp
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.