Granted Patent
Utility
US 6,835,667 · App. 10/172,795
Method for etching high-k films in solutions comprising dilute fluoride species
Inventors:
Kurt K. Christenson, Thomas J. Wagener, Neil Bruce Rosengren, Brent Schwab
Patented Case
View Patent ↗
Granted: Dec 28, 2004
Filed: Jun 14, 2002
Inventors
Kurt K. Christenson
Thomas J. Wagener
Neil Bruce Rosengren
Brent Schwab
Assignee (at issue)
FSI INTERNATIONAL, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.