Granted Patent
Utility
US 6,835,914 · App. 10/288,271
Apparatus and method for reducing stray light in substrate processing chambers
Inventor:
Paul Janis Timans
Patented Case
View Patent ↗
Granted: Dec 28, 2004
Filed: Nov 5, 2002
Inventor
Paul Janis Timans
Assignee (at issue)
Mattson Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.