Granted Patent
Utility
US 6,835,944 · App. 10/269,760
Low vapor pressure, low debris solid target for EUV production
Inventors:
Rocco A. Orsini, Michael B. Petach, Mark E. Michaelian, Henry Shields, Roy D. McGregor, Steven W. Fornaca
Patented Case
View Patent ↗
Granted: Dec 28, 2004
Filed: Oct 11, 2002
Inventors
Rocco A. Orsini
Michael B. Petach
Mark E. Michaelian
Henry Shields
Roy D. McGregor
Steven W. Fornaca
Assignee (at issue)
University of Central Florida Research Foundation, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.