IP Library Granted Patent US 6,836,014
Granted Patent Utility
US 6,836,014 · App. 10/264,716

Optical testing of integrated circuits with temperature control

Inventors: Dean Hunt, Don Haga
Patented Case View Patent ↗
Granted: Dec 28, 2004 Filed: Oct 3, 2002
Inventors
Dean Hunt
Don Haga
Assignee (at issue)
Credence Systems Corporation

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Quick Facts
Patent No.
US 6,836,014
App. No.
10/264,716
Filed
2002-10-03
Granted
2004-12-28
Kind
B2