Nitride-based semiconductor device and method of fabricating the same
A method of fabricating a nitride-based semiconductor device capable of reducing contact resistance between a nitrogen face of a nitride-based semiconductor substrate or the like and an electrode is provided. This method of fabricating a nitride-based semiconductor device comprises steps of etching the back surface of a first semiconductor layer consisting of either an n-type nitride-based semiconductor layer or a nitride-based semiconductor substrate having a wurtzite structure and thereafter forming an n-side electrode on the etched back surface of the first semiconductor layer.
1. A method of fabricating a nitride-based semiconductor device, comprising steps of:
etching the back surface of a first semiconductor layer consisting of either an n-type nitride-based semiconductor layer or a nitride-based semiconductor substrate having a wurtzite structure; and
thereafter forming an n-side electrode on said etched back surface of said first semiconductor layer.
2. The method of fabricating a nitride-based semiconductor device according to claim 1 , wherein
the back surface of said first semiconductor layer includes a nitrogen face of said first semiconductor layer.
3. The method of fabricating a nitride-based semiconductor device according to claim 1 , wherein
said etching step includes a step of etching the back surface of said first semiconductor layer by dry etching.
4. The method of fabricating a nitride-based semiconductor device according to claim 3 , wherein
said step of etching the back surface of said first semiconductor layer by dry etching includes a step of etching the back surface of said first semiconductor layer by reactive ion etching with Cl 2 gas and BCl 3 gas.
5. The method of fabricating a nitride-based semiconductor device according to claim 4 , wherein
the ratio of the flow rate of BCl 3 gas to the flow rate of Cl 2 gas in said step of etching the back surface of said first semiconductor layer by said reactive ion etching is at least 30% and not more than 70%.
6. The method of fabricating a nitride-based semiconductor device according to claim 3 , wherein
the etching depth and the etching time in said step of etching the back surface of said first semiconductor layer by said dry etching are proportional to each other.
7. The method of fabricating a nitride-based semiconductor device according to claim 1 , wherein
said etching step includes a step of etching the back surface of said first semiconductor layer thereby converting the back surface of said first semiconductor layer to a mirror surface.
8. The method of fabricating a nitride-based semiconductor device according to claim 1 , further comprising a step of performing heat treatment after said step of forming said n-side electrode.
9. The method of fabricating a nitride-based semiconductor device according to claim 1 , wherein
said etching step includes a step of etching the back surface of said first semiconductor layer by a thickness of at least about 1 μm.
10. The method of fabricating a nitride-based semiconductor device according to claim 1 , wherein
said first semiconductor layer includes said n-type nitride-based semiconductor layer or said nitride-based semiconductor substrate consisting of at least one material selected from a group consisting of GaN, BN, AlN, InN and TIN.
11. The method of fabricating a nitride-based semiconductor device according to claim 1 , wherein
said n-side electrode includes an Al film.
12. The method of fabricating a nitride-based semiconductor device according to claim 1 , wherein
said nitride-based semiconductor device is a nitride-based semiconductor light-emitting device.
13. The method of fabricating a nitride-based semiconductor device according to claim 1 , further comprising a step of dipping a nitrogen face of said etched first semiconductor layer in a solution containing at least one of chlorine, fluorine, bromine, iodine, sulfur and ammonium in advance of said step of forming said n-side electrode.
14. The method of fabricating a nitride-based semiconductor device according to claim 13 , further comprising a step of performing hydrochloric acid treatment on the back surface of said first semiconductor layer with an HCl solution in advance of said step of forming said n-side electrode.
15. The method of fabricating a nitride-based semiconductor device according to claim 1 , further comprising a step of polishing the back surface of said first semiconductor layer in advance of said etching step.
16. The method of fabricating a nitride-based semiconductor device according to claim 1 , wherein
said etching step includes a step of etching the back surface of said first semiconductor layer by wet etching.
17. The method of fabricating a nitride-based semiconductor device according to claim 16 , wherein
said step of etching the back surface of said first semiconductor layer by wet etching includes a step of etching the back surface of said first semiconductor layer with at least one etchant selected from a group consisting of aqua regia, KOH and K 2 S 2 O 8 .
18. The method of fabricating a nitride-based semiconductor device according to claim 16 , wherein
said step of etching the back surface of said first semiconductor layer by wet etching includes a step of etching the back surface of said first semiconductor layer while increasing the temperature to about 120° C.
19. A method of fabricating a nitride-based semiconductor device, comprising steps of:
etching a nitrogen face of a first semiconductor layer consisting of either an n-type nitride-based semiconductor layer or a nitride-based semiconductor substrate having a wurtzite structure by dry etching; and
thereafter forming an n-side electrode on said etched nitrogen face of said first semiconductor layer.