Wiring, TFT substrate using the same and LCD
A gate electrode (wiring) ( 40 ) having a Cu layer ( 40 a ) surrounded by a coating film ( 40 b ) made of titanium or titanium oxide; a TFT substrate ( 31 ) comprising the gate electrode (wiring) ( 40 ) and a LCD comprising a pair of opposing substrates and a liquid crystal disposed between the opposing substrates, wherein one of the pair of opposing substrates is a TFT substrate ( 31 ), are disclosed.
1. A wire in a gate electrode in a thin film transistor, comprising: a Cu (Copper) layer having a bottom surface, a top surface and two side surfaces, wherein said bottom surface is on and in contact with a first coating film made of titanium, and the remaining three surfaces are coated by and in contact with a second coating film made of titanium oxide.
2. A TFT (thin film transistor) substrate having a wire as claimed in claim 1 .
3. An LCD (liquid crystal display) comprising a pair of opposing substrates and a liquid crystal disposed between the opposing substrates, wherein at least one of the pair of opposing substrates is a TFT substrate as claimed in claim 2 .