Electroluminescent device and method for manufacturing the same
View Patent ↗An electroluminescent device and a method for manufacturing the same are provided to achieve a highly luminous electroluminescent device that can be used as a backlight for an LCD monitor. The electroluminescent device includes a substrate, a lower electrode layer having a surface of a plurality of convex shapes formed on the substrate, an insulating layer, a light-emitting layer, and an upper electrode layer sequentially formed on the lower electrode layer, and a passivation layer formed on the upper electrode layer. The method for manufacturing an electroluminescent device includes forming a lower electrode layer having a surface of a plurality of convex shapes on a substrate, sequentially forming an insulating layer, a light-emitting layer, and an upper electrode layer over the lower electrode layer to have substantially corresponding surface shapes as the lower electrode layer, and forming a passivation layer on the upper electrode layer.
1. A method for manufacturing an electroluminescent device, the method comprising:
forming, over a substrate, a lower electrode layer having a plurality of convex shapes in its surface;
forming, over the lower electrode layer, an insulating layer, a light-emitting layer, and an upper electrode layer in succession so that the insulating layer, the light-emitting layer, and the upper electrode layer have substantially the same surface profile as the lower electrode layer, wherein the upper electrode layer is directly formed on the light-emitting layer; and
forming a passivation layer over the upper electrode layer.
2. The method according to claim 1 , wherein forming the lower electrode layer includes:
forming, over the substrate, a polysilicon layer having the plurality of convex shapes in its surface; and
forming, over the polysilicon layer, a metal layer having substantially the same surface profile as the polysilicon layer.
3. The method according to claim 2 , wherein the polysilicon layer is formed by low pressure chemical vapor deposition (LPCVD) at a temperature between about 560° C. and about 610° C.
4. The method according to claim 1 , wherein forming the lower electrode layer includes:
forming, over the substrate, a tungsten layer having a plurality of convex shapes in its surface; and
forming, over the tungsten layer, a metal layer having substantially the same surface profile as the tungsten layer.
5. The method according to claim 4 , wherein the tungsten layer is formed by chemical vapor deposition (CVD).
6. The method according to claim 1 , wherein forming the lower electrode layer includes:
forming a metal layer over the substrate; and
etching a surface of the metal layer to form a plurality of convex shapes thereon.
7. The method according to claim 6 , wherein the metal layer is formed by thermal deposition.
8. The method according to claim 6 , wherein etching the surface of the metal layer includes performing at least one of wet etching and dry etching.
9. The method according to claim 1 , wherein forming the insulating layer includes forming a BaTiO 3 based material.
10. The method according to claim 1 , wherein forming the light-emitting layer includes performing at least one of electron deposition and sputtering.
11. The method according to claim 1 , wherein forming the upper electrode layer includes;
forming an indium tin oxide (ITO) layer; and
patterning the indium thin oxide layer.