Vertical optical path structure for infrared photodetection
Provided are a SiGe vertical optical path and a method for selectively forming a SiGe optical path normal structure for IR photodetection. The method comprises: forming a Si substrate surface; forming a Si feature, normal with respect to the Si substrate surface, such as a trench, via, or pillar; and, selectively forming a SiGe optical path overlying the Si normal feature. In some aspects, the Si substrate surface is formed a first plane and the Si normal feature has walls (sidewalls), normal with respect to the Si substrate surface, and a surface in a second plane, parallel to the first plane. Then, selectively forming a SiGe optical path overlying the Si normal feature includes forming a SiGe vertical optical path overlying the normal feature walls.
1. A silicon-germanium (SiGe) vertical optical path structure for infrared (IR) photodetection, the structure comprising:
a Si substrate with a surface in a first plane;
a Si feature, normal with respect to the Si substrate surface, wherein the normal feature includes walls, normal with respect to the Si substrate surface, and a surface in a second plane, parallel to the first plane; and,
a SiGe vertical optical path, formed overlying the Si normal feature walls, normal with respect to the Si substrate surface.
2. The structure of claim 1 further comprising:
a dielectric layer overlying the Si substrate surface and the normal feature surface.
3. The structure of claim 1 wherein the Si normal feature is selected from the group including a via, trench, and pillar.
4. The structure of claim 1 wherein the SiGe vertical optical path has a thickness in the range of 5 to 1000 nanometers (nm).
5. The structure of claim 1 wherein the SiGe vertical optical path has an optical path length in the range of 0.1 to 10 microns.
6. The structure of claim 1 wherein the SiGe vertical optical path includes SiGe with a Ge concentration in the range from 5 to 100%.
7. The structure of claim 1 wherein the SiGe vertical optical path includes SiGe with a graded Ge concentration that increases with respect to deposition thickness.
8. The structure of claim 7 wherein the SiGe vertical optical path has an X concentration of Ge at the normal feature wall interface, a Y concentration of Ge at a SiGe optical path normal structure surface, where Y>X, 0≦X≦0.3, and Y≦1, and the SiGe deposition thickness is in the range of 0.1 to 1 microns.
9. The structure of claim 1 wherein the SiGe vertical optical path includes a plurality of SiGe layers, where a Si layer is interposed between SiGe layers.
10. The structure of claim 2 wherein the Si substrate is included in a silicon-on-insulator (SOI) material that further includes a buried oxide (BOX) layer overlying the Si substrate, and a top Si layer overlying the BOX;
wherein the normal feature is a pillar formed in the top Si layer of the SOI; and,
wherein the dielectric layer overlying the Si substrate surface is BOX.
11. The structure of claim 10 wherein the top Si layer overlying the BOX has a thickness in the range of 0.1 to 2 microns.
12. The structure of claim 2 wherein the Si substrate is included in a SOI substrate, further including a BOX layer overlying the Si substrate, and a top Si layer overlying the BOX;
wherein the Si normal feature is selected from the group including a via and a trench, and formed in the top Si layer of the SOI;
wherein the dielectric layer overlying the normal feature surface is BOX.
13. The structure of claim 12 wherein the top Si layer has a thickness in the range of 0.1 to 2 microns.
14. The structure of claim 1 wherein the Si substrate is a bulk Si substrate.
15. The structure of claim 2 further comprising:
facets in the SiGe vertical optical path, adjacent the dielectric layer overlying the Si substrate and normal feature surfaces.
16. The structure of claim 1 wherein the SiGe vertical optical path is single crystal SiGe.
17. A silicon-germanium (SiGe) vertical optical path structure for infrared (IR) photodetection, the structure comprising:
a bulk Si substrate with a horizontal surface;
a Si feature, normal with respect to the Si substrate surface; and,
a SiGe vertical optical path, formed overlying the Si normal feature, normal with respect to the Si substrate surface.
18. A silicon-germanium (SiGe) vertical optical path structure for infrared (IR) photodetection, the structure comprising:
a Si substrate with a horizontal surface;
a Si feature, normal with respect to the Si substrate surface; and,
a SiGe vertical optical path, formed overlying the Si normal feature, normal with respect to the Si substrate surface, and including a plurality of SiGe layers, where a Si layer is interposed between SiGe layers.