Apparatus for synthesis of layers, coatings or films
Systems and methods are described for the synthesis of films, coatings or layers. An apparatus includes a first holder; a second holder coupled to the first holder; a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder; a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface; and a release layer coupled to the raised patterned surface of the reusable tool.
1. An apparatus, comprising:
a first holder;
a second holder coupled to the first holder;
a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface; and
a release layer coupled to the raised patterned surface of the reusable tool, wherein the first holder is adapted to hold a plurality of reusable tools.
2. The apparatus of claim 1 , wherein the second holder is selected from the group consisting of a platten, a roller and a conveyor.
3. The apparatus of claim 1 , wherein the linkage includes a pressure generator adapted to generate a pressure between the release layer and the second holder.
4. The apparatus of claim 3 , wherein the pressure generator can exert a pressure of from approximately 0.01 atm to approximately 10.0 atm between the release layer and the second holder.
5. The apparatus of claim 1 further comprising a heater coupled to the first holder.
6. The apparatus of claim 5 , wherein the first holder includes a roller and the heater is located within the roller.
7. An apparatus, comprising:
a first holder;
a second holder coupled to the first holder;
a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface;
a release layer coupled to the raised patterned surface of the reusable tool;
a heater coupled to the first holder; and
a cooler coupled to the first holder, where the heater applies an electrical bias to the reusable tool while simultaneously passing a current pulse through the reusable tool laterally.
8. The apparatus of claim 7 , wherein the heater can establish a temperature within a precursor layer that can be coupled to the second holder, between the release layer and the second holder, of from approximately 520° C. to approximately 635° C.
9. An apparatus, comprising:
a first holder;
a second holder coupled to the first holder;
a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface;
a release layer coupled to the raised patterned surface of the reusable tool;
a heater coupled to the first holder; and
a cooler coupled to the first holder, wherein the heater includes an electrically biased, heated piston that can be brought into contact with the first holder.
10. An apparatus, comprising:
a first holder;
a second holder coupled to the first holder;
a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface;
a release layer coupled to the raised patterned surface of the reusable tool;
a heater coupled to the first holder; and
a cooler coupled to the first holder, wherein the heater radiatively heats the first holder to a reaction temperature while simultaneously biasing the reusable tool via an electrical contact that is coupled to the reusable tool.
11. An apparatus, comprising:
a first holder;
a second holder coupled to the first holder;
a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface;
a release layer coupled to the raised patterned surface of the reusable tool; and
a precursor deposition subassembly coupled to the second holder, the precursor deposition subassembly adapted to couple a precursor layer to the second holder, wherein the release layer includes at least one fluoride selected from the group consisting of CaF 2 and SrF 2 .
12. An apparatus, comprising:
a first holder;
a second holder coupled to the first holder;
a linkage coupled to the first holder and the second holder to move the first holder relative to the second holder;
a reusable tool coupled to the first holder, the reusable tool including a raised patterned surface;
a release layer coupled to the raised patterned surface of the reusable tool;
a precursor deposition subassembly coupled to the second holder, the precursor deposition subassembly adapted to couple a precursor layer to the second holder; and
a circuit coupled to the first holder and the second holder to apply an electrostatic field across the first holder and the second holder.
13. The apparatus of claim 12 , wherein the circuit can apply an electrostatic field strength of from approximately 0.03 volts/micron to approximately 3.5 volts/micron.
14. The apparatus of claim 13 , wherein the electrostatic field strength can be from approximately 0.3 volts/micron to approximately 1.0 volts/micron.