Semiconductor device having thin film resistor protected from oxidation
View Patent ↗A semiconductor device, a method for manufacturing the semiconductor device, and an integrated circuit including the semiconductor device are disclosed. The semiconductor device includes a substrate section, a resistor formed on the substrate section, a metal pattern formed on the resistor, an oxide pattern formed on the metal pattern, and a protective film covering the resistor, the metal pattern and the oxide pattern. With this structure, the metal pattern sufficiently prevents formation of an oxide film on a surface of the resistor even when dry ashing or dry etching is performed in the manufacturing process.
1. A semiconductor device comprising:
a substrate section;
a metal thin film resistor formed on the substrate section;
a patterned layer formed on the surface of the metal thin film resistor, the patterned layer having a horizontal width equal to a horizontal width of the metal thin film resistor;
a patterned oxide layer formed on the patterned layer; and
a nitride protective film covering and in direct contact with each of the metal thin film resistor, the patterned layer and the patterned oxide layer, wherein the patterned layer and the nitride protective film prevent formation of an oxide film on the metal thin film resistor.
2. The semiconductor device of claim 1 , wherein the nitride protective film prevents formation of an oxide film on a side surface of the metal thin film resistor.
3. The semiconductor device of claim 1 , wherein the substrate section includes a silicon substrate coated with a silicon oxide film.
4. The semiconductor device of claim 1 , wherein the metal thin film resistor includes a thin film made of a material selected from NiCr, TaN, CrSi 2 , CrSiN, CrSi and CrSiO.
5. The semiconductor device of claim 1 , wherein the patterned oxide layer includes silicon oxide.
6. The semiconductor device of claim 1 , wherein the nitride protective film includes plasma nitride.
7. The semiconductor device of claim 1 , wherein the patterned oxide layer has a horizontal width larger than the horizontal width of the patterned layer.
8. The semiconductor device of claim 1 , further comprising a side wall section provided between a side surface of the patterned oxide layer and a corresponding surface of the nitride protective film.
9. The semiconductor device of claim 8 , wherein the side wall section includes a silicon oxide.
10. The semiconductor device of claim 8 , wherein the side wall section includes an amorphous silicon.
11. The semiconductor device of claim 1 , wherein the metal thin film resistor has opposing side edges, and the nitride protective film covers the opposing side edges.
12. The semiconductor device of claim 11 , wherein the nitride protective film contacts the opposing side edges.
13. The semiconductor device of claim 1 , wherein the patterned layer includes SiN.
14. A semiconductor device comprising:
a substrate section;
a metal thin film resistor formed on the substrate section;
a patterned layer formed on the metal thin film resistor;
a patterned oxide layer formed on the patterned layer; and
a nitride protective film covering and in direct contact with each of the metal thin film resistor, the patterned layer and the patterned oxide layer, wherein the patterned layer and the nitride protective film prevent formation of an oxide film on the metal thin film resistor, and
wherein the patterned layer has a horizontal width sufficient to prevent formation of an oxide film between an upper surface of the metal thin film resistor and a bottom surface of the patterned layer.
15. A semiconductor device comprising:
a substrate section;
a metal thin film resistor formed on the substrate section;
a patterned layer including SiN formed on the metal thin film resistor;
a patterned oxide layer formed on the patterned layer; and
a nitride protective film covering and in direct contact with each of the metal thin film resistor, the patterned layer and the patterned oxide layer, wherein the patterned layer and the nitride protective film prevent formation of an oxide film on the metal thin film resistor.