Method of fabricating liquid crystal display panel
A method of fabricating a liquid crystal display panel includes forming a first conductive layer on a substrate and patterning the first conductive layer using a first resist pattern printed on the first conductive layer to form a gate pattern. A semiconductor layer and a second conductive layer are stacked on a gate insulating film formed on the gate pattern. A second resist pattern having a stepped part printed on the second conductive layer forms a source/drain pattern of a transistor. A third resist pattern printed on a passivation film formed on the substrate patterns the film. A third conductive layer is formed on the patterned film and the third resist pattern and the third resist pattern is stripped to form a transparent electrode pattern including a pixel electrode connected to the drain electrode of the transistor.
1. A method of fabricating a liquid crystal display panel, the method comprising:
forming a first conductive layer on a substrate;
printing a first resist pattern on the first conductive layer,
patterning the first conductive layer using the first resist pattern to form a gate pattern including a gate line and a gate electrode;
forming a gate insulating film on the gate pattern;
sequentially stacking a semiconductor layer and a second conductive layer on the gate insulating film;
printing a second resist pattern having a stepped part on the second conductive layer;
patterning the semiconductor layer and the second conductive layer using the second resist pattern having the stepped part to form a source/drain pattern including a semiconductor pattern, a data line, a source electrode of a thin film transistor and a drain electrode of the thin film transistor;
forming a passivation film on the substrate having the source/drain pattern;
printing a third resist pattern on the passivation film;
patterning the passivation film using the third resist pattern;
forming a third conductive layer on the patterned passivation film and the third resist pattern; and
removing the third resist pattern to form a transparent electrode pattern including a pixel electrode connected to the drain electrode of the thin film transistor,
wherein printing the second resist pattern includes:
adhering a fourth resist pattern to a first roller by contacting a first printing plate with the first roller, the first printing plate having the fourth resist pattern printed thereon;
forming the fourth resist pattern on the second conductive layer by contacting the first roller having the fourth resist pattern adhered thereto onto the second conductive layer;
adhering a fifth resist pattern to a second roller by contacting a second printing plate with the second roller, the second printing plate having the fifth resist pattern printed thereon; and
forming the fifth resist pattern on the fourth resist pattern by contacting the second roller having the fifth resist pattern adhered thereto onto the fourth resist pattern.
2. The method according to claim 1 , wherein the fourth resist pattern is formed with a pattern identical to the source/drain pattern.
3. The method according to claim 1 , wherein the fifth resist pattern is formed with a pattern identical to the source/drain pattern except without a portion of the source/drain pattern formed on an area overlapped with a channel area of the semiconductor pattern.
4. A method of fabricating a liquid crystal display panel, the method comprising:
forming a first conductive layer on a substrate;
printing a first resist pattern on the first conductive layer;
patterning the first conductive layer using the first resist pattern to form a gate pattern including a gate line and a gate electrode;
forming a gate insulating film on the gate pattern;
sequentially stacking a semiconductor layer and a second conductive layer on the gate insulating film;
printing a second resist pattern having a stepped part on the second conductive layer, wherein the printing step comprises adhering the second resist pattern to a second roller by contacting a second printing plate with the second, the second printing plate having, the second resist pattern printed thereon, and forming the second resist pattern on the second conductive layer by contacting the second roller having the second resist pattern adhered thereto onto the second conductive layer;
patterning the semiconductor layer and the second conductive layer using the second resist pattern having the stepped part to form a source/drain pattern including a semiconductor pattern, a data line, a source electrode of a thin film transistor and a drain electrode of the thin film transistor;
forming a passivation film on the substrate having the source/drain pattern;
printing a third resist pattern on the passivation film;
patterning the passivation film using the third resist pattern;
forming a third conductive layer on the patterned passivation film and the third resist pattern; and
removing the third resist pattern to form a transparent electrode pattern including a pixel electrode connected to the drain electrode of the thin film transistor.