Method of fabricating semiconductor device using low dielectric constant material film
The semiconductor device is capable of coping with speedup of operation using a low dielectric constant material film other than silicon. The base ( 10 ) formed by the substrate ( 11 ) and the low dielectric constant material film ( 12 ) whose relative dielectric constant is lower than silicon is provided. The semiconductor element layer including the MOS transistor ( 30 ) is adhered onto the surface of the base ( 10 ) for stacking. The transistor ( 30 ) is formed by using the island-shaped single-crystal Si film ( 31 ) and buried in the insulator films ( 15 ), ( 16 ) and ( 17 ). The multilayer wiring structure ( 18 ) is formed on the semiconductor element layer and is electrically connected to the transistor ( 30 ). The electrode ( 20 ) functioning as a return path for the signals is formed on the back surface of the base ( 10 ). Instead of forming the electrode ( 20 ) on the base ( 10 ), the electrodes ( 20 A) may be arranged on the back surface of the base ( 10 A), configuring the base ( 10 A) as an interposer.
1. A method of fabricating a semiconductor device, comprising the steps of:
(a) forming a base having a first surface and a second surface located on an opposite side to the first surface;
the base including a low dielectric constant material film whose relative dielectric constant is lower than silicon;
(b) forming a semiconductor element on a sacrificial substrate using an island-shaped semiconductor film;
(c) forming an insulator film to cover the semiconductor element on the sacrificial substrate to bury the element in the insulator film; thereby forming a first semiconductor element layer;
(d) joining the first semiconductor element layer and the first surface of the base together directly or by way of another layer;
(e) eliminating the sacrificial substrate;
(f) forming a first wiring layer on an opposite side of the first semiconductor element layer to the base directly or by way of another layer; and
(g) forming an electrode on the second surface of the base
the electrode forming a return path for a signal transmitted through the first wiring layer;
wherein in the step (b), the island-shaped semiconductor film has a limited dimension that realizes a necessary characteristic of the semiconductor layer; and
the base, the first semiconductor element layer, and the first wiring layer constitute a three-dimensional stacked structure.
2. A method according to claim 1 , wherein the base used in the step (a) includes a substrate made of insulator, semiconductor, or metal that does not hinder a characteristic of low dielectric constant of the low dielectric constant material film; and
the low dielectric constant material film is formed on the substrate.
3. A method according to claim 1 , wherein the base used in the step (a) is formed by only the low dielectric constant material film.
4. A method according to claim 1 , wherein in the step (d), the insulator film burying the semiconductor element of the first semiconductor element layer and the first surface of the base are opposed and joined to each other.
5. A method according to claim 1 , wherein the step (d), an opposite surface of the first semiconductor element layer to the insulator film burying the semiconductor element, and the first surface of the base are opposed and joined to each other.
6. A method according to claim 1 , wherein in the step (d), the first semiconductor element layer and the first surface of the base are joined together by way of a second semiconductor element layer or a second wiring layer.
7. A method according to claim 1 , wherein in the step (f), the first wiring layer is formed on an opposite side of the first semiconductor element layer to the base by way of a second semiconductor element layer or a second wiring layer.
8. A method according to claim 1 , wherein the semiconductor element formed by using the island-shaped semiconductor film in the step (b) is a field-effect transistor; and
the transistor comprises a first gate electrode formed on a side of the semiconductor film, and a second gate electrode formed on an opposite side to the first gate electrode.
9. A method according to claim 8 , wherein the first gate electrode of the transistor is located on a side of the base with respect to the island-shaped semiconductor film when the first semiconductor element layer and the first surface of the base are joined to each other in the step (d).
10. A method according to claim 1 , wherein the semiconductor element formed by using the island-shaped semiconductor film in the step (b) is a field-effect transistor; and
the transistor comprises a first gate electrode formed on a side of the semiconductor film.
11. A method according to claim 10 , wherein the first gate electrode of the transistor is located on a side of the base with respect to the island-shaped semiconductor film when the first semiconductor element layer and the first surface of the base are joined to each other in step (d).
12. A method of fabricating a semiconductor device, comprising the steps of:
(a) forming a base having a first surface and a second surface located on an opposite side to the first surface;
the base including a low dielectric constant material film whose relative dielectric constant is lower than silicon;
(b) forming a semiconductor element on a sacrificial substrate using an island-shaped semiconductor film;
(c) forming an insulator film to cover the semiconductor element on the sacrificial substrate to bury the element in the insulator film; thereby forming a first semiconductor
element layer;
(d) joining the first semiconductor element layer and the first surface of the base together directly or by way of another layer;
(e) forming buried interconnections penetrating through the base;
(f) eliminating the sacrificial substrate;
(g) forming a first wiring layer on an opposite side of the first semiconductor element layer to the base directly or by way of another layer; and
(h) forming electrodes on the second surface of the base;
the electrodes being contacted with the respective interconnections;
wherein the base, the electrodes, and the interconnections have a function of interposer; and
in the step (b), the island-shaped semiconductor film has a limited dimension that realizes a necessary characteristic of the semiconductor element, thereby suppressing signal propagation induced by the semiconductor film; and
the base, the first semiconductor element layer, and the first wiring layer constitute a three-dimensional stacked structure.
13. A method according to claim 12 , wherein the base used in the step (a) includes a substrate made of insulator, semiconductor, or metal that does not hinder a characteristic of low dielectric constant of the low dielectric constant material film; and
the low dielectric constant material film is formed on the substrate.
14. A method according to claim 12 , wherein the base used in the step (a) is formed by only the low dielectric constant material film.