Patterned-print thin-film transistors with top gate geometry
View Patent ↗A self-aligned, thin-film, top-gate transistor and method of manufacturing same are disclosed. A first print-patterned mask is formed over a metal layer by digital lithography, for example by printing with a phase change material using a droplet ejector. The metal layer is then etched using the first print-patterned mask to form source and drain electrodes. A semiconductive layer and an insulative layer are formed thereover. A layer of photosensitive material is then deposited and exposed through the substrate, with the source and drain electrodes acting as masks for the exposure. Following development of the photosensitive material, a gate metal layer is deposited. A second print-patterned mask is then formed over the device, again by digital lithography. Etching and removal of the photosensitive material leaves the self-aligned top-gate electrode.
1. A method for manufacturing an electrical component on a substantially transparent substrate comprising the steps of:
depositing a first metal layer over at least a portion of the transparent substrate;
depositing a first masking material layer over at least a portion of said first metal layer by digital lithography to thereby form a first patterned etch mask;
removing said first metal layer, except in the regions underlying said first patterned etch mask, to thereby form source and drain electrodes;
removing said first patterned etch mask;
depositing a semiconductive layer over at least a portion of the transparent substrate and said source and drain electrodes;
depositing an insulative layer over at least a portion of said semiconductive layer;
depositing a layer of photosensitive material over at least a portion of said insulative layer;
exposing the layer of photosensitive material to radiation by directing said radiation initially through the transparent substrate, such that said source and drain electrodes serve to mask said radiation from exposing portions of said photosensitive material layer;
developing said layer of photosensitive material such that such material exposed to said radiation is removed and such material not exposed to said radiation remains over a portion of said insulative layer;
depositing a second metal layer over at least a portion of said insulative layer and said remaining photosensitive material;
depositing a second masking material layer onto at least a portion of said second metal layer by digital lithography to thereby form a second patterned etch mask;
removing said second metal layer, said insulative layer, and said semiconductive layer, etching, except in the regions underlying said second patterned etch mask;
removing said second patterned etch mask; and
removing said remaining photosensitive material, such that the mechanical connection of regions of said second metal layer deposited directly thereover are weakened sufficiently that said regions physically disconnect from the remainder of said second metal layer and may be removed.
2. The method of claim 1 wherein said first and second masking materials are deposited with a minimum resolution which determines the minimum width of a masking feature, and further wherein the steps of depositing said source and drain electrodes results in said source and drain electrodes being spaced apart from one another by a distance which is less than the minimum width of said masking feature.
3. The method of claim 1 , further including the step of depositing a contact material layer over at least a portion of said first metal layer, and further wherein said first masking material is deposited over at least a portion of said contact material layer.
4. The method of claim 1 , wherein said digital lithography comprises ejecting, in liquid form, droplets of a phase-change material in a pattern onto at least a portion of at least one layer of the electrical component, the droplets at least partially changing from liquid to solid phase after impact with said layer to thereby form a patterned etch mask.
5. The method of claim 4 wherein said source and drain electrodes are formed to be spaced apart from one another by a distance which is less than the average diameter of the majority of said droplets of phase-change material for said pattern etch mask.
6. The method of claim 5 wherein the average diameter of the majority of said droplets of phase-change material for said pattern etch mask is at least 20 microns.
7. The method of claim 1 , wherein an adhesion layer is first deposited before, and immediately under, each of said first and second masking material layers.
8. The method of claim 1 , further comprising the steps of:
depositing a data line layer over substantially the entire device;
depositing a third masking material layer over at least a portion of said data line layer by digital lithography to thereby form a third patterned etch mask;
removing said data line layer, except in the regions underlying said third patterned etch mask, to thereby form a data line;
removing said third patterned etch mask;
depositing a layer of encapsulation material substantially over the entire device;
depositing a fourth masking material layer over at least a portion of said encapsulation layer by digital lithography to thereby form a fourth patterned etch mask;
removing said encapsulation layer, except in the regions underlying said fourth patterned etch mask, to thereby form at least one via in said encapsulation layer;
removing said fourth patterned etch mask;
depositing a gate line layer over substantially all of the encapsulation layer;
depositing a fifth masking material layer over at least a portion of said gate line layer by digital lithography to thereby form a fifth patterned etch mask; and
removing said gate line layer, except in the regions underlying said fifth patterned etch mask, to thereby form a gate line.
9. A method for manufacturing an electrical component on a substantially transparent substrate comprising the steps of:
depositing a first metal layer over at least a portion of the transparent substrate;
depositing a first masking material layer over at least a portion of said first metal layer by digital lithography to thereby form a first patterned etch mask;
removing said first metal layer, except in the regions underlying said first patterned etch mask, to thereby form source and drain electrodes;
removing said first patterned etch mask;
depositing a semiconductive layer over least a portion of the transparent substrate and said source and drain electrodes;
depositing an insulative layer over at least a portion of said semiconductive layer;
depositing a layer of photosensitive material over at least a portion of said insulative layer;
exposing the layer of photosensitive material to radiation by directing said radiation initially through the transparent substrate, such that said source and drain electrodes serve to mask said radiation from exposing portions of said photosensitive material layer;
developing said layer of photosensitive material such that such material exposed to said radiation is removed and such material not exposed to said radiation remains over a portion of said insulative layer;
depositing a second metal layer over at least a portion of said insulative layer, such that said second metal layer is not deposited in those regions in which is located said remaining photosensitive material;
removing said remaining photosensitive material;
depositing a second masking material layer by digital lithography onto at least a portion of said second metal layer and portions of said insulative layer exposed by the removal of said remaining photosensitive material to thereby form a second patterned etch mask;
removing said second metal layer, said insulative layer, and said semiconductive layer by etching, except in the regions underlying said second patterned etch mask; and
removing said second patterned etch mask.
10. The method of claim 9 , wherein said first and second masking materials are deposited with a minimum resolution which determines the minimum width of a masking feature, and further wherein the steps of depositing said source and drain electrodes results in said source and drain electrodes being spaced apart from one another by a distance which is less than the minimum width of said masking feature.
11. The method of claim 9 , further including the step of depositing a contact material layer over at least a portion of said first metal layer, and further wherein said first masking material is deposited over at least a portion of said contact material layer.
12. The method of claim 9 , wherein said digital lithography comprises ejecting, in liquid form, droplets of a phase-change material in a pattern onto at least a portion of at least one layer of the electrical component, the droplets at least partially changing from liquid to solid phase after impact with said layer to thereby form a patterned etch mask.
13. The method of claim 12 wherein said source and drain electrodes are formed to be spaced apart from one another by a distance which is less than the average diameter of the majority of said droplets of phase-change material for said pattern etch mask.
14. The method of claim 13 wherein the average diameter of the majority of said droplets of phase-change material for said pattern etch mask is at least 20 microns.
15. The method of claim 9 , wherein the step of depositing a second metal layer comprises depositing said second metal layer by electro-less plating.
16. The method of claim 9 , further comprising the step of depositing a layer of transparent conductive material over at least a portion of said insulative layer, and further wherein the step of depositing a second metal layer comprises depositing said second metal layer by electro-plating.
17. The method of claim 9 , wherein an adhesion layer is first deposited before, and immediately under, each of said first and second masking material layers.
18. The method of claim 9 , further comprising the steps of:
depositing a data line layer over substantially the entire device;
depositing a third masking material layer over at least a portion of said data line layer by digital lithography to thereby form a third patterned etch mask;
removing said data line layer, except in the regions underlying said third patterned etch mask, to thereby form a data line;
removing said third patterned etch mask;
depositing a layer of encapsulation material substantially over the entire device;
depositing a fourth masking material layer over at least a portion of said encapsulation layer by digital lithography to thereby form a fourth patterned etch mask;
removing said encapsulation layer, except in the regions underlying said fourth patterned etch mask, to thereby form at least one via in said encapsulation layer;
removing said fourth patterned etch mask;
depositing a gate line layer over substantially all of the encapsulation layer;
depositing a fifth masking material layer over at least a portion of said gate line layer by digital lithography to thereby form a fifth patterned etch mask; and
removing said gate line layer, except in the regions underlying said fifth patterned etch mask, to thereby form a gate line.