Method for forming inkjet nozzles having a coiled thermal actuator mechanism
View Patent ↗A nozzle of an ink jet printer is formed by initially providing a silicon wafer having a circuitry wafer layer including electrical circuitry necessary for the operation of the thermal actuators on demand. The actuator is formed by forming a first inert material layer defining an actuator path in the shape of a planar coil starting at the thermal actuator anchor. Then, a first conductive material layer is formed adjacent the actuator path and attached to the first inert material layer.
1. A method of manufacture of a thermal actuator for an ink jet printer comprising a series of nozzle chambers from each of which ink is ejected via the utilization of a thermal actuator device, the method comprising the steps of:
forming a first non-conductive material layer of a thermal actuator defining an actuator path in the shape of a planar coil starting at a thermal actuator anchor;
forming a first conductive material layer of the thermal actuator adjacent said actuator path and attached to said first non-conductive material layer.
2. A method according to claim 1 wherein said step of forming a first conductive material layer includes forming first and second conductive material layers with a layer of non-conductive material therebetween, said first and second conductive material layers having a conductive interconnect.
3. A method as claimed in claim 1 wherein said conductive material layer comprises substantially titanium nitride or titanium diboride.
4. A method as claimed in claim 1 wherein said non-conductive material layer comprises substantially glass.