Method for adjusting the resonant frequency of an oscillating device
A method for increasing the resonant frequency of a torsional hinged device having a reduced attaching area between the torsional hinges and the supporting anchors. The resonant frequency is increased by adding a material over the reduced area to stiffen the connection between the torsional hinges and the support anchors.
1. A method for adjusting the resonant frequency of an oscillating device comprising the steps of:
providing a resonant device comprising first and second torsional hinges for supporting an oscillating member, said first and second torsional hinges connected to first and second anchor members respectively, each of said first and second anchor members having mounting portions and a central portion joined by a connecting region of reduced stiffness; and
adding material over said defined connecting region to increase the stiffness between said central portions and said mounting portion of said anchor members to increase the resonant frequency of said device.
2. The method of claim 1 wherein the stiffness of said connecting region is reduced by decreasing the cross-sectional area of said connecting region.
3. The method of claim 2 wherein said step of decreasing the cross-sectional area comprises the step of thinning the material of said connecting region.