Granted Patent
B2
US 7,442,933 · App. 11/345,968 · Granted Oct 28, 2008
Bolometer having an amorphous titanium oxide layer with high resistance stability
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Abstract
A bolometer is provided for use in an infrared imager. The bolometer comprises a substrate and a TiOx layer formed over the substrate. The TiOx layer has a resistance responsive to temperature. The x value of the TiOx layer is in the range of 1.68 to 1.95.
Claims (4)
1. A bolometer for use in an infrared imager, comprising:
a substrate; and
a TiOx layer formed over the substrate, the TiOx layer having a resistance responsive to temperature, where x is in the range of 1.68 to 1.95,
wherein the TiOx layer is heated at a predetermined temperature in a range of 300° C. to 420° C. for a predetermined period in a range of 5 to 20 minutes such that the TiOx layer has a substantially constant resistance stability.
Assignments (6)
RELEASE OF SECURITY INTEREST
Recorded Apr 9, 2018
From: WELLS FARGO BANK, NATIONAL ASSOCIATION SUCCESSOR BY MERGER TO WACHOVIA BANK, NATIONAL ASSOCIATION
To: DRS SENSORS & TARGETING SYSTEMS, INC.
Reel/Frame 045877/0857 →
CHANGE OF NAME
Recorded Mar 31, 2015
From: DRS RSTA, INC.
To: DRS NETWORK & IMAGING SYSTEMS, LLC
Reel/Frame 035349/0060 →
RELEASE OF SECURITY INTEREST
Recorded Jun 24, 2010
From: WELLS FARGO BANK, N.A.
To: DRS SENSORS & TARGETING SYSTEMS, INC.
Reel/Frame 024588/0189 →
CHANGE OF NAME
Recorded Feb 8, 2010
From: DRS SENSORS & TARGETING SYSTEMS, INC.
To: DRS RSTA, INC.
Reel/Frame 023905/0520 →
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Mar 26, 2009
From: LIN, ALICE L.
To: DRS SENSORS & TARGETING SYSTEMS, INC.
Reel/Frame 022453/0926 →
SECURITY AGREEMENT
Recorded Feb 22, 2008
From: DRS SENSORS & TARGETING SYSTEMS, INC.
To: WACHOVIA BANK, NATIONAL ASSOCIATION
Reel/Frame 020549/0193 →
Continuity (2)
Provisional Application
6064952300
· Feb 3, 2005