IP Library › Granted Patent US 7,482,736
Granted Patent B2
US 7,482,736 · App. 11/634,009 · Granted Jan 27, 2009

Piezoelectric laminate, surface acoustic wave device, thin-film piezoelectric resonator, and piezoelectric actuator

Assignee: Seiko Epson Corporation
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Quick Facts
Patent No.
US 7,482,736
App. No.
11/634,009
Granted
Jan 27, 2009
Kind
B2
Abstract

A piezoelectric laminate including a base and a first piezoelectric layer formed above the base and including potassium sodium niobate. The first piezoelectric layer is shown by a compositional formula (K a Na 1-a ) x NbO 3 , “a” and “x” in the compositional formula being respectively 0.1<a<1 and 1≦x≦1.2.

Claims (64)

1. A piezoelectric laminate comprising:

a base; and

a first piezoelectric layer formed above the base and including (K a Na 1-a ) x NbO 3 , wherein “a” is 0.1<a<1 and “x” is 1≦x≦1.2.

2. The piezoelectric laminate as defined in claim 1 ,

wherein “x” is 1<x≦1.1.

3. A piezoelectric laminate comprising:

a substrate;

an orientation control layer formed above the substrate;

piezoelectric film formed above the orientation control layer; and

wherein the piezoelectric film includes potassium sodium niobate.

4. A surface acoustic wave device comprising the piezoelectric laminate as defined in claim 1 .

5. A piezoelectric resonator comprising the piezoelectric laminate as defined in claim 1 .

6. A piezoelectric actuator comprising:

a substrate;

an elastic layer formed above the substrate;

a first electrode formed above the elastic layer;

a piezoelectric film formed above the first electrode; and

a second electrode formed above the piezoelectric film,

wherein the piezoelectric film includes (K a Na 1-a ) x NbO 3 , “a” is 0.1<a<1 and “x”is 1≦x≦1.2.

7. The piezoelectric laminate according to claim 1 , wherein “a” is 0.2≦a≦0.7.

8. The piezoelectric laminate according to claim 2 , wherein “a” is 0.2≦a≦0.7.

9. The piezoelectric laminate according to claim 1 , wherein (K a Na 1-a ) x NbO 3 includes pseudocubic (100) orientation.

10. The piezoelectric laminate according to claim 2 , wherein (Ka a Na 1-n ) x NbO 3 includes pseudocubic (100) orientation.

11. The piezoelectric laminate according to claim 7 , wherein (Ka a Na 1-a ) x NbO 3 includes pseudocubic (100) orientation.

12. The piezoelectric laminate according to claim 8 , wherein (K a Na 1-a ) x NbO 3 includes pseudocubic (100) orientation.

13. The piezoelectric laminate according to claim 3 , wherein the piezoelectric layer includes (K a Na 1-a ) x NbO 3 wherein “a” is 0.1<a<1 and “x” is 1≦x≦1.2.

14. The piezoelectric laminate according to claim 13 , wherein “a” is 0.2 ≦a≦0.7.

15. The piezoelectric laminate according to claim 13 , wherein “x” is 1≦X<1.1.

16. The piezoelectric laminate according to claim 14 , wherein “x” is 1≦X<1.1.

17. The piezoelectric laminate according to claim 3 , wherein the piezoelectric film includes pseudocubic (100) orientation.

18. The piezoelectric laminate according to claim 13 , wherein (K a Na 1-3 ) x NbO 3 includes pseudocubic (100) orientation.

19. The piezoelectric laminate according to claim 14 , wherein the piezoelectric film includes pseudocubic (100) orientation.

20. The piezoelectric laminate according to claim 15 , wherein the piezoelectric film includes pseudocubic (100) orientation.

21. The piezoelectric laminate according to claim 16 , wherein the piezoelectric film includes pseudocubic (100) orientation.

22. The piezoelectric laminate according to claim 3 , wherein the orientation control layer includes nickel lanthanate.

23. The piezoelectric laminate according to claim 13 , wherein the orientation control layer includes nickel lanthanate.

24. The piezoelectric laminate according to claim 14 , wherein the orientation control layer includes nickel lanthanate.

25. The piezoelectric laminate according to claim 15 , wherein the orientation control layer includes nickel lanthanate.

26. The piezoelectric laminate according to claim 16 , wherein the orientation control layer includes nickel lanthanate.

27. The piezoelectric laminate according to claim 17 , wherein the orientation control layer includes nickel lanthanate.

28. The piezoelectric laminate according to claim 18 , wherein the orientation control layer includes nickel lanthanate.

29. The piezoelectric laminate according to claim 19 , wherein the orientation control layer includes nickel lanthanate.

30. The piezoelectric laminate according to claim 20 , wherein the orientation control layer includes nickel lanthanate.

31. The piezoelectric laminate according to claim 21 , wherein the orientation control layer includes nickel lanthanate.

32. An inkjet head comprising the piezoelectric laminate as defined in claim 3 .

33. A liquid jetting head comprising the piezoelectric laminate as defined in claim 3 .

34. A surface acoustic wave device comprising laminate as defined in claim 3 .

35. The piezoelectric actuator according to claim 6 , wherein “a” is 0.2≦x≦0.7.

36. The piezoelectric actuator according to claim 6 , wherein “x” is 1≦x<1.1.

37. The piezoelectric actuator according to claim 35 , wherein “x” is 1<x<1.1.

38. The piezoelectric actuator according to claim 6 , wherein (K a Na 1-a )xNbO 3 includes pseudocubic (100) orientation.

39. The piezoelectric actuator according to claim 35 , wherein (K a Na 1-a )xNbO 3 includes pseudocubic (100) orientation.

40. The piezoelectric actuator according to claim 36 , wherein (K a Na 1-a )xNbO 3 includes pseudocubic (100) orientation.

41. The piezoelectric actuator according to claim 37 , wherein (K a Na 1-a )xNbO 3 includes pseudocubic (100) orientation.

42. The piezoelectric actuator according to claim 6 , further comprising a nickel lanthanate film formed between the first electrode and the piezoelectric film.

43. The piezoelectric actuator according to claim 35 , further comprising a nickel lanthanate film formed between the first electrode and the piezoelectric film.

44. The piezoelectric actuator according to claim 36 , further comprising a nickel lanthanate film formed between the first electrode and the piezoelectric film.

45. The piezoelectric actuator according to claim 37 , further comprising a nickel lanthanate film formed between the first electrode and the piezoelectric film.

46. The piezoelectric actuator according to claim 38 , further comprising a nickel lanthanate film formed between the first electrode and the piezoelectric film.

47. The piezoelectric actuator according to claim 39 , further comprising a nickel lanthanate film formed between the first electrode and the piezoelectric film.

48. The piezoelectric actuator according to claim 40 , further comprising a nickel lanthanate film formed between the first electrode and the piezoelectric film.

49. The piezoelectric actuator according to claim 41 , further comprising a nickel lanthanate film formed between the first electrode and the piezoelectric film.

50. An inkjet head comprising the piezoelectric actuator as defined in claim 6 .

51. A liquid jetting head comprising the piezoelectric actuator as defined in claim 6 .

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 5, 2006
From: UENO, MAYUMI; HIGUCHI, TAKAMITSU; KIJIMA, TAKESHI
To: SEIKO EPSON CORPORATION
Reel/Frame 018661/0891 →
Priority Claims (2)
JP 2005-351955 · Dec 6, 2005 · national
JP 2006-113494 · Apr 17, 2006 · national
Continuity (1)
Related Publication 20070126313A1 · Jun 7, 2007