Liquid crystal display device and method for making the same
A method for manufacturing a substrate of a TFT LCD device is disclosed with following steps: providing a transparent substrate having a thin film transistors area and a storing capacitor area; forming an aluminum metal layer and a metal protecting layer on the substrate; patterning a first pattern on the aluminum metal layer of the TFT area, and a second pattern on the metal protecting layer of the storing capacitor area through a halftone mask; forming an aluminum nitride layer on the patterned metal protecting layer; removing the aluminum nitride layer form a rugged surface; forming patterned gates, patterned sources, and patterned drains over the patterned metal protecting layer of the TFT area, and forming a second metal layer over the rugged surface of the aluminum layer on the storing capacitor area, wherein the second metal layer is electrically connected with the drains; and forming patterned pixel electrodes.
1. A method for manufacturing a lower plate in an image display device, comprising:
providing a transparent substrate having a thin film transistors (TFT) area and a storing capacitor area;
forming an aluminum metal layer(or an aluminum alloy layer) and a metal protecting layer on the substrate, wherein the aluminum metal layer is located between the metal protecting layer and the transparent substrate;
patterning a first pattern on the aluminum metal layer of the TFT area, and a second pattern on the metal protecting layer of the storing capacitor area through a halftone mask;
forming an aluminum nitride layer on the patterned metal protecting layer of the storing capacitor area;
removing the aluminum nitride layer located on the patterned metal protecting layer of the storing capacitor area to form a rugged surface;
forming patterned gates, patterned sources, and patterned drains over the patterned metal protecting layer of the TFT area, and forming a second metal layer over the rugged surface of the aluminum layer on the storing capacitor area, wherein the second metal layer is electrically connected with the drains; and
forming patterned pixel electrodes.
2. The method of claim 1 , further comprises a step of forming a planarizing layer located between the pixel electrode and the second metal layer.
3. The method of claim 1 , further comprises a step of forming a buffer layer disposed between the aluminum metal layer and the transparent substrate, and the buffer layer is made of titanium, titanium nitride, molybdenum, chromium, or the alloy thereof.
4. The method of claim 1 , wherein the metal protecting layer is made of titanium, titanium nitride, molybdenum, chromium, or the alloy thereof.
5. The method of claim 1 , wherein the thickness of the aluminum nitride layer is from 150 Åto 1500 Å.
6. The method of claim 1 , further comprises a step of forming an insulation layer and at least one semi-conductive layer located between the metal protecting layer, the gates, the sources, and the drains in the thin film transistor area.
7. The method of claim 1 , further comprises a step of forming an insulation layer located between the second metal layer and the aluminum metal layer with the rugged surface in the storing capacitor area.