Semiconductor device with effective heat-radiation
The semiconductor device has a silicon layer (SOI layer) ( 12 ) formed through a silicon oxide film ( 11 ) on a support substrate ( 10 ). A transistor (T 1 ) is formed in the SOI layer ( 12 ). The wiring ( 17 a ) is connected with a source of the transistor (T 1 ) through a contact plug ( 15 a ). A back metal ( 18 ) is formed on an under surface (back surface) of the support substrate ( 10 ) and said back metal ( 18 ) is connected with the wiring ( 17 a ) through a heat radiating plug ( 16 ). The contact plug ( 15 a ), the heat radiating plug ( 16 ) the wiring ( 17 a ) and the back metal ( 18 ) is made of a metal such as aluminum, tungsten and so on which has a higher thermal conductivity than that of the silicon oxide film ( 11 ) and the support substrate ( 10 ).
1. A semiconductor device, comprising:
a first insulating film;
a silicon layer formed on said first insulating film and in which a semiconductor element is built;
a second insulating film formed on said silicon layer and said semiconductor element;
a first wiring formed on said second insulating film and connected to ground;
a first plug connecting a source of a MOS transistor of said silicon layer with said first wiring;
a predetermined back metal film formed under said first insulating film;
a second plug connecting said first wiring with said back metal film; and
a support substrate composed of a material of higher resistance than that of said back metal film in a predetermined position between said first insulating film and said back metal film, wherein
said first and second plugs, said wiring and said back metal film have a higher thermal conductivity than that of said first insulating film;
said semiconductor element is the MOS transistor;
only said second plug that is connected with the source of said MOS transistor is connected with said back metal film;
said semiconductor device is formed with a first semiconductor chip and a second semiconductor chip;
said first semiconductor chip and said second semiconductor chip are different from each other in power consumption;
said back metal film of said first semiconductor chip is connected with a protruding pad of said second semiconductor chip; and
there is an interspace between said first semiconductor chip and said second semiconductor chip.
2. The semiconductor device according to claim 1 , wherein
said back metal film is connected with either a ground or a power source.
3. The semiconductor device according to claim 1 , wherein
said back metal film is divided into several pieces.
4. The semiconductor device according to claim 3 , wherein
said back metal film is divided at least into a part connected with a ground and a part connected with a power source.
5. The semiconductor device according to claim 1 , further comprising:
a second wiring connected electrically with said back metal film and covering from above said semiconductor element, wherein
said back metal film covers from below said semiconductor element.
6. The semiconductor device according to claim 1 , wherein
a circuit region including at least one of a transistor, an inductor, a varactor and a resistance is provided in said semiconductor device, and
said predetermined position of said support substrate is below said circuit region.
7. The semiconductor device according to claim 1 , wherein
said metal back film is formed of a material except for a conductor.
8. The semiconductor device according to claim 1 , wherein
said first plug and said second plug are formed in one and there is no boundary therebetween.
9. The semiconductor device of claim 1 , wherein said second plug is directly connected to the back metal film.
10. The semiconductor device of claim 1 , wherein said back metal film is not connected to a signal line.