Electroluminescence device having stacked capacitors
An electroluminescence (EL) device includes a substrate and a plurality of pixels formed on the substrate. Each pixel includes a first area including at least a first capacitor and a second capacitor, the first capacitor including a first conductive layer, a first dielectric layer over the first conductive layer, and a second conductive layer over the first dielectric layer, and the second capacitor including the second conductive layer, a second dielectric layer over the second conductive layer, and a third conductive layer over the second dielectric layer, and a second area including a first semiconductor layer formed on the substrate, a first gate oxide layer over the first semiconductor layer, and a fourth conductive layer over the first gate oxide layer.
1. An electroluminescence (EL) device, comprising:
a substrate; and
a plurality of pixels formed on the substrate, each pixel being in a respective pixel area, each pixel area including at least a first area, a second area, and a third area, wherein each pixel includes:
at least a first capacitor and a second capacitor in the first area, the first capacitor including a first conductive layer formed over a first gate oxide layer, a first dielectric layer over the first conductive layer, and a second conductive layer over the first dielectric layer, and the second capacitor including the second conductive layer, a second dielectric layer over the second conductive layer, and a third conductive layer over the second dielectric layer;
a transistor in the second area, the transistor including a first semiconductor layer formed on the substrate, the first gate oxide layer over the first semiconductor layer, and a fourth conductive layer over the first gate oxide layer, wherein the fourth conductive layer is formed of the same conductive film as the first conductive layer, and wherein both the first conductive layer and the fourth conductive layer are directly formed on the gate oxide layer; and
a light emitting device in the third area, the light emitting device including a fifth conductive layer, a first organic layer over the fifth conductive layer, and a sixth conductive layer over the first organic layer, wherein the sixth conductive layer is formed of the same conductive film as the third conductive layer.
2. The device of claim 1 , each pixel further comprising a seventh conductive layer in the second area for providing contact to the first semiconductor layer.
3. The device of claim 1 , wherein the second dielectric layer comprises a passivation layer and a capping layer.
4. The device of claim 3 , wherein at least one of the passivation layer and the capping layer comprises silicon nitride.
5. The device of claim 1 , wherein the second conductive layer and the fifth conductive layer both comprise indium tin oxide (ITO).
6. The device of claim 1 , wherein the second dielectric layer comprises a layer of passivation silicon nitride and a second organic layer formed on the layer of passivation silicon nitride, the second organic layer comprising the same material as the first organic layer.
7. The device of claim 1 , wherein the second dielectric layer comprises a passivation layer, a capping layer on the passivation layer and a second organic layer formed on the capping layer, at least one of the passivation layer and the capping layer comprising silicon nitride, and the second organic layer comprising the same material as the first organic layer.