Method for fabricating thin film transistor
View Patent ↗The present invention relates to a method for fabricating thin film transistor, more particularly, to a method for fabricating thin film transistor which not only manufactures a polycrystalline silicon layer having large grain size and containing a trace of residual metal catalyst by heat treating thereby crystallizing the metal catalyst layer after forming an amorphous silicon layer on a substrate, forming a capping layer formed of nitride film having 1.78 to 1.90 of the refraction index when crystallizing the amorphous silicon layer and forming a metal catalyst layer on the capping layer, but also controls characteristics of the polycrystalline silicon layer by controlling the refraction index of the capping layer.
1. A method for fabricating thin film transistor comprising the steps of:
preparing an insulation substrate;
forming an amorphous silicon layer on the substrate;
forming a capping layer having 1.78 to 1.90 of a refraction index on the amorphous silicon layer;
forming a metal catalyst layer only on an upper surface of the capping layer; and
crystallizing the amorphous silicon layer into a polycrystalline silicon layer by heat treating the substrate,
wherein the method further comprises the steps of removing the capping layer; forming a semiconductor layer by patterning the polycrystalline silicon layer; and forming a gate insulation film, a gate electrode, an interlayer insulation film and source/drain electrodes on the substrate after the step of crystallizing the amorphous silicon layer into the polycrystalline silicon layer by heat treating the substrate.
2. The method for fabricating thin film transistor according to claim 1 ,
wherein the step of forming the metal catalyst layer on the capping layer is a step of depositing one or more of metal catalysts selected from Ni, Pd, Ti, Ag, Au, Al, Sn, Sb, Cu, Co, Mo, Tr, Ru, Rh, Cd and Pt on the capping layer.
3. The method for fabricating thin film transistor according to claim 1 ,
wherein the step of forming the metal catalyst layer on the capping layer is a step of forming the metal catalyst layer to an areal density of 10 11 to 10 15 atoms/cm 2 on the capping layer.
4. The method for fabricating thin film transistor according to claim 1 ,
wherein the heat treatment process comprises a first heat treatment process and a second heat treatment process.
5. The method for fabricating thin film transistor according to claim 4 ,
wherein the first heat treatment process is a process of performing heat treatment in the temperature range of 200 to 600° C., and the second heat treatment process is a process of performing heat treatment in the temperature range of 400 to 1300° C.
6. The method for fabricating thin film transistor according to claim 1 ,
wherein the capping layer is formed to thickness of 100 to 1500 Å.
7. The method for fabricating thin film transistor according to claim 1 ,
wherein the refraction index is proportional to a process power used in forming the capping layer and inversely proportional to a ratio of ammonia gas to silane gas used in forming the capping layer.
8. The method for fabricating thin film transistor according to claim 1 , wherein the capping layer is a silicon nitride film.
9. The method for fabricating thin film transistor according to claim 1 ,
wherein during the heat treating, a portion of the metal catalyst layer moves through the capping layer to form a seed that is used to crystallize the amorphous silicon layer.
10. A method for fabricating thin film transistor comprising the steps of:
preparing an insulation substrate;
forming an amorphous silicon layer on the substrate;
forming a capping layer having 1.78 to 1.90 of a refraction index on the amorphous silicon layer;
forming a metal catalyst layer on the capping layer; and
crystallizing the amorphous silicon layer into a polycrystalline silicon layer by heat treating the substrate,
wherein during the heat treating, a portion of the metal catalyst layer moves through the capping layer to form a seed that is used to crystallize the amorphous silicon layer, and
wherein the heat treatment process comprises a first heat treatment process and a second heat treatment process.
11. The method for fabricating thin film transistor according to claim 10 ,
wherein the method further comprises the steps of removing the capping layer; forming a semiconductor layer by patterning the polycrystalline silicon layer; and forming a gate insulation film, a gate electrode, an interlayer insulation film and source/drain electrodes on the substrate after the step of crystallizing the amorphous silicon layer into the polycrystalline silicon layer by heat treating the substrate.
12. The method for fabricating thin film transistor according to claim 10 ,
wherein the step of forming the metal catalyst layer on the capping layer is a step of depositing one or more of metal catalysts selected from Ni, Pd, Ti, Ag, Au, Al, Sn, Sb, Cu, Co, Mo, Tr, Ru, Rh, Cd and Pt on the capping layer.
13. The method for fabricating thin film transistor according to claim 10 ,
wherein the step of forming the metal catalyst layer on the capping layer is a step of forming the metal catalyst layer to an areal density of 10 11 to 10 15 atoms/cm 2 on the capping layer.
14. The method for fabricating thin film transistor according to claim 10 ,
wherein the first heat treatment process is a process of performing heat treatment in the temperature range of 200 to 600° C., and the second heat treatment process is a process of performing heat treatment in the temperature range of 400 to 1300° C.
15. The method for fabricating thin film transistor according to claim 10 ,
wherein the capping layer is formed to thickness of 100 to 1500 Å.
16. The method for fabricating thin film transistor according to claim 10 ,
wherein the refraction index is proportional to a process power used in forming the capping layer and inversely proportional to a ratio of ammonia gas to silane gas used in forming the capping layer.
17. The method for fabricating thin film transistor according to claim 10 ,
wherein the capping layer is a silicon nitride film.
18. The method for fabricating thin film transistor according to claim 10 ,
wherein the first heat treatment process moves the seed to an interface of the capping layer and the amorphous silicon layer, and the second heat treatment process crystallizes the amorphous silicon layer into the polycrystalline silicon layer using the seed.
19. A method for fabricating thin film transistor comprising the steps of:
preparing an insulation substrate;
forming an amorphous silicon layer on the substrate;
forming a capping layer having 1.78 to 1.90 of a refraction index on the amorphous silicon layer;
forming a metal catalyst layer only on an upper surface of the capping layer; and
crystallizing the amorphous silicon layer into a polycrystalline silicon layer by heat treating the substrate,
wherein the refraction index is proportional to a process power used in forming the capping layer and inversely proportional to a ratio of ammonia gas to silane gas used in forming the capping layer.
20. The method for fabricating thin film transistor according to claim 19 ,
wherein during the heat treating, a portion of the metal catalyst layer moves through the capping layer to form a seed that is used to crystallize the amorphous silicon layer.