Method of forming pattern
View Patent ↗A method of forming a pattern is disclosed, which can improve the interfacial properties between a soft mold and a substrate including a pattern-formation material, the method comprising loading a substrate coated with a pattern-formation material into a chamber; positioning a soft mold, whose surface is provided with embossing and depressed patterns, in opposite to the substrate inside the chamber; forming an adsorption layer by evaporating some components of the pattern-formation material and adsorbing the components evaporated from the pattern-formation material to the surface of soft mold; forming a pattern layer with a shape being inverted to the embossing and depressed patterns included in the surface of soft mold by bring the soft mold including the adsorption layer into contact with the remaining pattern-formation material; and separating the soft mold from the pattern layer.
1. A method of forming a pattern comprising:
loading a substrate coated with a pattern-formation material into a chamber;
positioning a soft mold, whose surface is provided with embossing and depressed patterns, in opposite to the substrate inside the chamber;
forming an adsorption layer by evaporating some components of the pattern-formation material and adsorbing the components evaporated from the pattern-formation material to the surface of soft mold;
forming a pattern layer with a shape being inverted to the embossing and depressed patterns included in the surface of soft mold by bring the soft mold including the adsorption layer into contact with the remaining pattern-formation material; and
separating the soft mold from the pattern layer.
2. The method of claim 1 , further comprising aging the adsorption layer after formation of the adsorption layer.
3. The method of claim 1 , wherein the adsorption layer is formed at a uniform thickness on the surface of the soft mold.
4. The method of claim 1 , wherein the adsorption layer corresponds to about 5%˜20% of the entire amount of pattern-formation material coated on the substrate.
5. The method of claim 1 , wherein forming the adsorption layer is carried out with the decrease of pressure by discharging air inside the chamber to the external.
6. The method of claim 5 , wherein the chamber includes a pressure-reducing device.
7. The method of claim 1 , wherein forming the adsorption layer is carried out by heating the substrate inside the chamber.
8. The method of claim 7 , wherein a hot plate is provided in a predetermined portion of the chamber on which the substrate is mounted.
9. The method of claim 1 , wherein forming the adsorption layer is performed in state of maintaining the surface of soft mold and the surface of pattern-formation material on the substrate at a predetermined interval therebetween.
10. The method of claim 9 , wherein the pattern-formation material on the substrate is provided at an interval of 1 mm to 3 cm from the soft mold.
11. The method of claim 1 , wherein the pattern layer is photo-cured when forming the pattern layer with the shape being inverted to the embossing and depressed patterns included in the surface of soft mold by bring the soft mold including the adsorption layer into contact with the remaining pattern-formation material.
12. The method of claim 11 , wherein the pattern layer formed by photo-curing includes an adsorption layer on the surface of soft mold, and the remaining pattern-formation material on the substrate.
13. The method of claim 1 , wherein one of the pattern-formation material and the soft mold has the hydrophilic interfacial property, and the other thereof has the hydrophobic property.
14. The method of claim 13 , wherein the pattern-formation material is comprised of hydrophilic liquid pre-polymer of photo-curable property, photo-initiator and surfactant.
15. The method of claim 14 , wherein the soft mold is formed of PDMS(polydimethylsiloxane) or polyurethane.
16. The method of claim 14 , wherein the hydrophilic liquid pre-polymer of photo-curable property includes at least any one of HEA(2-Hydroxyehyl acrylate), EGDMA(Ethyleneglycol dimethancrylate), EGPEA(Ethyleneglycol phenyletheracrylate), HPA(Hydroxypropyl acrylate), and HPPA(Hydroxyl phenoxypropyl acrylate).