IP Library Granted Patent US 7,679,145
Granted Patent B2
US 7,679,145 · App. 10/930,247 · Granted Mar 16, 2010

Transistor performance enhancement using engineered strains

Assignee: Intel Corporation
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,679,145
App. No.
10/930,247
Granted
Mar 16, 2010
Kind
B2
Abstract

A semiconductor substrate having metal oxide semiconductor (MOS) devices, such as an integrated circuit die, is mechanically coupled to a stress structure to apply a stress that improves the performance of at least a portion of the MOS devices on the die.

Claims (32)

1. An apparatus comprising

a die having a semiconductor substrate and metal oxide semiconductor (MOS) devices;

a metal matrix stress structure with uniaxial carbon fibers mechanically coupled to the substrate and aligned with respect to the substrate so that under thermal expansion, the carbon fibers apply a uniaxial stress that improves the performance of at least a portion of the MOS devices.

2. The apparatus of claim 1 , wherein the stress structure comprises a metal heat spreader thermally coupled to the substrate.

3. The apparatus of claim 1 , wherein the stress structure comprises a metal plate soldered to the substrate.

4. The apparatus of claim 1 , wherein the stress structure comprises an integrated heat spreader.

5. The apparatus of claim 1 , wherein the stress structure comprise a film that is applied to a surface of the substrate.

6. The apparatus of claim 5 , wherein the film is applied by chemical vapor deposition.

7. The apparatus of claim 5 , wherein the film comprises a chemical vapor deposition diamond film.

8. An apparatus comprising:

a semiconductor die comprising metal oxide semiconductor (MOS) devices;

a heat spreader having a first coefficient of thermal expansion in one direction and a second different coefficient of thermal expansion in a second perpendicular direction, so that when coupled to the die the heat spreader applies a different stress to the die in the first direction than in the second direction; and

a heat sink coupled to the heat spreader.

9. The apparatus of claim 8 , wherein the heat spreader applies a compressive stress to the die in the first direction at the operational temperature.

10. The apparatus of claim 8 , wherein the heat spreader has a second coefficient of thermal expansion in the second perpendicular direction, that is greater than the coefficient of thermal expansion of the die.

11. The apparatus of claim 8 , wherein the second coefficient of thermal expansion is lower than the coefficient of thermal expansion of the die, so that the heat spreader applies a tensile stress in the second direction at the operating temperature.

12. The apparatus of claim 8 , wherein the heat spreader comprises a metal matrix with uniaxial carbon fibers.

13. The apparatus of claim 8 , wherein the coefficient of thermal expansion of the heat spreader is selected to result in a determined stress on the die at an operating temperature of the die, the apparatus further comprising

a solder to couple the heat spreader to the die at a temperature higher then the operating temperature of the die, the solder forming a mechanical bond that does not creep at operating and ambient temperatures.

14. An apparatus comprising:

a die;

a stress structure mechanically coupled to the die at a first temperature, the stress structure having a coefficient of thermal expansion different from the die;

wherein the die and coupled stress structure are maintained at a second lower temperature, so that the stress structure applies a stress to the die at the second temperature through the mechanical coupling.

15. The apparatus of claim 14 , wherein the stress structure comprises a metal heat spreader and wherein the mechanically coupling comprises a solder connection between the heat spreader and the die.

16. The apparatus of claim 14 , wherein the stress structure comprises a coating and wherein the mechanically coupling comprises a coating deposited on the die.

17. The apparatus of claim 14 , wherein the second temperature comprises an operating temperature of the die.

18. A computer system comprising:

a motherboard; and

a processor coupled to the motherboard, the processor having a die including a semiconductor substrate and metal oxide semiconductor (MOS) devices and a stress structure mechanically coupled to the substrate and aligned with respect to the substrate so that under thermal expansion, the stress structure applies a stress in one direction with respect to the substrate through the mechanical coupling that improves the performance of at least a portion of the MOS devices.

19. The computer system of claim 18 wherein the processor is coupled to the motherboard using a socket.

20. The computer system of claim 18 , wherein the stress structure comprises a material having a coefficient of thermal expansion different from the coefficient of thermal expansion of the substrate so that the stress structure applies a stress to the substrate at an operating temperature.

21. The system of claim 20 , wherein the stress structure comprises a metal matrix with uniaxial carbon fibers.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 31, 2004
From: HE, JUN; MA, ZHIYONG; MAIZ, JOSE A.; BOHR, MARK; GILES, MARTIN D.; XU, GUANGHAI
To: INTEL CORPORATION
Reel/Frame 015763/0183 →
Continuity (1)
Related Publication 20060043579A1 · Mar 2, 2006