Optical communication module
The an optical communication module associated with the present invention comprises a semiconductor substrate, a light emitting element mounted on said semiconductor substrate to output light for transmission (transmitted light), a light receiving element mounted with an adhesive resin on said semiconductor substrate to convert light received (received light) to an electric signal and a wavelength filter to branch out the received light guided to said light receiving element and the transmitted light output from said light emitting element. A groove for an optical path, through which the received light passes to be guided to said light receiving element and a first protective groove formed around said groove for an optical path to block said adhesive resin from intruding into said groove for an optical path are formed on said semiconductor substrate.
1. An optical communication module, comprising:
a semiconductor substrate including a resin-coated region;
an optical path groove formed in the substrate;
a first protective groove formed in the substrate between the optical path groove and the resin-coated region;
a reflective member disposed in the optical path groove;
a glass substrate disposed on the semiconductor substrate and at least partially covering the optical path groove and the reflective member;
an adhesive resin coated on the resin-coated region to attach the glass substrate to the semiconductor substrate; and
a light receiving element mounted on said semiconductor substrate to receive light reflected by the reflective member.
2. The optical communication module according to claim 1 , wherein said first protective groove is formed to surround three sides of said path groove.
3. The optical communication module according to claim 1 , further comprising:
a plurality of concave alignment marks formed on said semiconductor substrate; and
a second protective groove formed on said semiconductor substrate around said alignment marks to block said adhesive resin from intruding into said alignment marks.
4. An optical communication module according to claim 3 , wherein said first protective groove and said second protective groove are connected to each other to separate the resin-coated region from said optical path groove and said alignment marks.
5. The optical communication module according to claim 1 , wherein said optical path groove has a cross-section which is a V-shape.
6. An optical communication module according to claim 1 , wherein said first protective groove is arranged apart from said optical path groove.
7. An optical communication module according to claim 6 , wherein said first protective groove is arranged under said glass substrate.
8. An optical communication module, comprising:
a semiconductor substrate including a resin-coated region;
an optical path groove formed in the substrate;
a first convex bump formed in the substrate between the optical path groove and the resin-coated region;
a reflective member disposed in the optical path groove;
a glass substrate disposed on the semiconductor substrate and least partially covering the optical path groove and the reflective member;
an adhesive resin coated on the resin-coated region to attach the glass substrate to the semiconductor substrate; and
a light receiving element mounted on said semiconductor substrate to receive light reflected by the reflective member.
9. The optical communication module according to claim 8 , wherein said first convex bump is formed to surround three sides of said groove for an optical path.
10. The optical communication module according to claim 8 , further comprising:
a plurality of concave alignment marks formed on said semiconductor substrate; and
a second convex bump formed on said semiconductor substrate around said alignment marks to block said adhesive resin from intruding into said alignment marks.
11. An optical communication module according to claim 10 , wherein said first convex bump and said second convex bump are connected to each other to separate the resin-coated region from said optical path groove and said alignment marks.
12. The optical communication module according to claim 8 , wherein said optical path groove has a cross-section which is a V-shape.
13. An optical communication module according to claim 8 , wherein said first convex bump is arranged under said glass substrate.