Micromirror array lens with fixed focal length
View Patent ↗The present invention provides a Micromirror Array Lens (MMAL) with fixed focal length to reproduce a designed surface having optical focusing power. The micro mechanical structures with surface profile shape memory are fabricated and released after fabrication. Each micromirror in the MMAL has its own motion by stiction force and/or electrostatic force while and/or after the releasing process. Once the designed surface is formed, the MMAL has an optical power as a lens.
1. A Micromirror Array Lens with fixed focal length comprising a substrate and a plurality of micromirrors having reflecting surfaces, wherein each micromirror has at least one micro mechanical element including a support configured to support the micromirror, wherein the micromirrors form and maintain a designed surface using a stiction force, wherein the sizes of the micromirrors and the positions of the supports are selected to form the designed surface having an optical focusing power as a lens and satisfying convergence condition and phase matching condition.
2. The Micromirror Array Lens with fixed focal length of claim 1 , wherein a surface profile shape memory is built in the structure of the micro mechanical elements of the micromirrors to form the designed surface.
3. The Micromirror Array Lens with fixed focal length of claim 2 , wherein the micro mechanical elements of each micromirror are fabricated to determine motion of the micromirror and to form the designed surface.
4. The Micromirror Array Lens with fixed focal length of claim 1 , wherein the support or supports are located between the reflecting surface of the micromirror and the substrate of the Micromirror Array Lens.
5. The Micromirror Array Lens with fixed focal length of claim 1 , wherein the heights of the supports are selected to form the designed surface.
6. The Micromirror Array Lens with fixed focal length of claim 1 , wherein the designed surface is formed by electrostatic force between the micro mechanical elements and the micromirrors.
7. The Micromirror Array Lens with fixed focal length of claim 1 , wherein the designed surface is formed by the stiction force between the micro mechanical elements and the micromirrors in the Micromirror Array Lens while releasing the structures of the micro mechanical elements and the micromirrors.
8. The Micromirror Array Lens with fixed focal length of claim 7 , wherein the designed surface is formed by the initial operation of the Micromirror Array Lens.
9. The Micromirror Array Lens with fixed focal length of claim 7 , wherein the support for each micromirror is the substrate.
10. The Micromirror Array Lens with first focal length of claim 7 , wherein the designed surface is maintained by the stiction force and electrostatic force between the micro mechanical elements and the micromirrors.
11. The Micromirror Array Lens with fixed focal length of claim 7 , wherein the designed surface of the Micromirror Array Lens is formed and arranged in a flat surface.
12. The Micromirror Array Lens with fixed focal length of claim 7 , wherein the designed surface is formed and arranged in a surface with a curvature.
13. The Micromirror Array Lens with fixed focal length of claim 7 , wherein the designed surface is prepared to correct aberration of an optical system, wherein the sizes of the micromirrors and the positions of the supports are selected to correct aberration of the optical system.
14. The Micromirror Array Lens with fixed focal length of claim 7 , wherein the designed surface reproduces conic surfaces.
15. The Micromirror Array Lens with fixed focal length of claim 7 , wherein the designed surface reproduces aspherical surfaces.
16. The Micromirror Array Lens with fixed focal length of claim 7 , wherein the designed surface reproduces anamorphic aspherical surfaces.
17. The Micromirror Array Lens with fixed focal length of claim 7 , wherein the designed surface reproduces free surfaces.
18. The Micromirror Array Lens with fixed focal length of claim 7 , wherein the designed surface reproduces a Fresnel type reflective lens.
19. The Micromirror Array Lens with fixed focal length of claim 7 , wherein the designed surface reproduces a diffractive optical element.
20. The Micromirror Array Lens with fixed focal length of claim 1 , wherein the plurality of micromirrors form a Micromirror Array Lens or array of Micromirror Array Lenses.
21. The Micromirror Array Lens with fixed focal length of claim 1 , wherein the shape of each micromirror are selected to form the designed surface.
22. A Micromirror Array Lens with fixed focal length comprising a substrate and a plurality of micromirrors having reflecting surfaces, wherein each micromirror has at least one micro mechanical element including a support configured to support the micromirror, wherein the micromirrors form and maintain a designed surface using a stiction force, wherein the shapes and sizes of the micromirrors are selected to form the designed surface having an optical focusing power as a lens and satisfying convergence condition and phase matching condition.