Optical microstructure plate and fabrication mold thereof
An optical microstructure plate and mold for fabricating the same is disclosed. The optical microstructure plate comprises a substrate. An optical microstructure element is formed on the substrate. A period alignment mark is disposed on the substrate to provide alignment for fabricating the optical microstructure element by a mold. A universal alignment mark is disposed on the substrate to provide alignment for bonding another plate therewith. Specifically, the mold comprises a concave within a mold substrate, a spoiler around the concave, and a buffer zone adjacent to the spoiler.
1. An optical microstructure plate, comprising:
a substrate;
an optical microstructure element formed on the substrate;
a period alignment mark disposed on the substrate to provide alignment for fabricating the optical microstructure element by a mold; and
a universal alignment mark disposed on the substrate to provide alignment for bonding another plate therewith.
2. The optical microstructure plate as claimed in claim 1 , wherein the optical microstructure element comprises filters.
3. The optical microstructure plate as claimed in claim 1 , wherein the optical microstructure element comprises diffractive elements.
4. The optical microstructure plate as claimed in claim 1 , wherein the optical microstructure element comprises lenses.
5. The optical microstructure plate as claimed in claim 1 , wherein the optical microstructure element comprises gratings.
6. The optical microstructure plate as claimed in claim 1 , wherein the period alignment mark or universal alignment mark is triangular.
7. The optical microstructure plate as claimed in claim 1 , wherein the period alignment mark or universal alignment mark is square.
8. The optical microstructure plate as claimed in claim 1 , wherein the period alignment mark or universal alignment mark is polygonal.
9. The optical microstructure plate as claimed in claim 1 , wherein the period alignment mark or universal alignment mark is crossed.
10. The optical microstructure plate as claimed in claim 1 , wherein the period alignment mark or universal alignment mark is circular.
11. The optical microstructure plate as claimed in claim 1 , wherein the period alignment mark or universal alignment mark is sawtoothed.
12. The optical microstructure plate as claimed in claim 1 , wherein the mold is used for fabricating optical microstructure element and comprises:
a concave within a mold substrate;
a spoiler around the concave; and
a buffer zone adjacent to the spoiler.