Optical transparent member and optical system using the same
View Patent ↗It is an object to provide an optical transparent member capable of maintaining a high-performance antireflection effect for a base over a long period of time, and an optical system using the same, specifically an optical transparent member including on a base a layer containing SiO 2 as a main component, a layer containing Al 2 O 3 as a main component, and a plate crystal layer formed from plate crystals containing Al 2 O 3 as a main component, wherein the surface of the plate crystal layer has a shape of irregularities, and an optical system using the same.
1. An optical member having antireflection performance comprising:
a base,
a layer containing silicon oxide in a molar content of 40% or more which is the largest content among contents of all components, with the layer containing silicon oxide being formed directly on the base;
an amorphous oxide layer containing aluminum oxide in a molar content of 50% or more, with the amorphous oxide layer being formed directly on the layer containing silicon oxide; and
a plate crystal layer formed on the surface of the amorphous oxide layer from plate crystals containing aluminum oxide in a molar content of 50% or more,
wherein the surface of the plate crystal layer has a shape of irregularities, and
wherein a refractive index n b of the base, a refractive index n s of the layer containing silicon oxide, and a refractive index n a of the amorphous oxide layer containing aluminum oxide meet a relation of n b ≧n s ≧n a .
2. The optical member according to claim 1 , wherein a refractive index of the plate crystal layer containing aluminum oxide in a molar content of 50% or more is decreased gradually toward the surface of the plate crystal layer.
3. The optical member according to 1 , wherein a thickness of the plate crystal layer is in a range of 20 nm to 1000 nm.
4. The optical member according to claim 1 , wherein for the shape of irregularities of the surface of the plate crystal layer, an average surface roughness Ra′ value obtained by two-dimensional extension of an average roughness on the centerline of the surface with irregularities is in a range of 5 nm to 100 nm, and a surface area ratio S r =S/S 0 (where S 0 represents an area when a measurement surface is ideally flat and S represents a surface area of an actual measurement surface) is in a range of 1.1 to 3.5.
5. The optical member according to claim 1 , wherein a thickness of the layer containing silicon oxide in a molar content of 40% or more which is the largest content among contents of all components is in a range of 5 nm to 100 nm, and a thickness of the amorphous oxide layer containing aluminum oxide in a molar content of 50% or more is in a range of 10 nm to 120 nm.
6. The optical member according to claim 1 , wherein the layer containing silicon oxide in a molar content of 40% or more which is the largest content among contents of all components, contains at least one of titanium and zirconium.