Electrode structure in semiconductor device and related technology
View Patent ↗A first insulation film having a first opening is provided on an electrode pad of a semiconductor chip. A second insulation film having a second opening is provided on the first insulation film. A ground metallic layer which is to be in contact with the electrode pad via the first opening is provided on the first insulation film. A bump which is to be mechanically and electrically connected to the ground metallic layer is provided. Further, the above placement is made in a way that the ground metallic layer is provided in the second opening, and the ground metallic layer is provided on an inner side than an outer periphery of the electrode pad, covering the first opening.
1. An electrode structure in a semiconductor device comprising:
a semiconductor chip comprising an electrode pad;
a first insulation film having a first opening and provided on the electrode pad;
a second insulation film having a second opening and provided on the first insulation film;
a ground metallic layer provided on the first insulation film and in contact with the electrode pad via the first opening; and
a bump mechanically and electrically connected to the ground metallic layer, wherein
the ground metallic layer is provided in an opening of the second opening,
the ground metallic layer is provided on an inner side than an outer periphery of the electrode pad, covering the first opening,
an outer peripheral diameter of the ground metallic layer is smaller than an outer peripheral diameter of the electrode pad and larger than an opening diameter of the first opening,
an opening diameter of the second opening is larger than the outer peripheral diameter of the ground metallic layer, and
the opening diameter of the second opening is at least 1.1 times as large as the outer peripheral diameter of the ground metallic layer.
2. The electrode structure in a semiconductor device as claimed in claim 1 , wherein the opening diameter of the second opening is smaller than the outer peripheral diameter of the electrode pad.
3. The electrode structure in a semiconductor device as claimed in claim 1 , wherein a film thickness of the first insulation film is at most 1 μm.
4. A semiconductor wafer comprising a wafer substrate, wherein
a plurality of semiconductor chips are provided on the wafer substrate, and
the semiconductor chips have the electrode structure as claimed in claim 1 .
5. A semiconductor device comprising a wiring substrate and a semiconductor chip flip-chip-mounted on the wiring substrate, wherein,
the semiconductor chip has the electrode structure as claimed in claim 1 .
6. The semiconductor device as claimed in claim 5 , wherein a gap between the semiconductor chip and the wiring substrate is filled with under-fill resin.
7. An electronic device comprising a device main body and the semiconductor device as claimed in claim 5 mounted on the device main body.
8. The electrode structure in a semiconductor device as claimed in claim 1 , wherein the opening diameter of the second opening is larger than an outer peripheral diameter of the electrode pad.