Thin-film circuit device having a low strength region, method for manufacturing the thin-film circuit device, and electronic apparatus
A thin-film circuit device includes a substrate and a thin-film circuit layer, disposed on the substrate, having an element region and a low-strength region. The element region includes thin-film elements. The low-strength region extends between an end portion of the thin-film circuit layer and the element region and has a mechanical strength less than that of the surroundings of the low-strength region.
1. A thin-film circuit device comprising:
a substrate;
a thin-film circuit layer disposed on the substrate, the thin-film circuit layer having an element region; and
a low-strength region provided in the thin-film circuit layer, the low strength region extending between an end portion of the thin-film circuit layer and the element region,
wherein the thin-film circuit layer includes a first protective layer provided on the substrate, a thin-film transistor provided on the first protective layer in the element region, and a second protective layer covering the thin-film transistor,
wherein the low-strength region has a groove formed in the second protective layer, the groove surrounding the element region, and
wherein the groove has a depth equal to at least one half of a thickness of the thin-film circuit layer.
2. The thin-film circuit device according to claim 1 , wherein the low-strength region surrounds the element region several times.
3. The thin-film circuit device according to claim 1 , wherein the low-strength region has a plurality of grooves surrounding the element region.
4. The thin-film circuit device according to claim 1 , wherein the groove has a V shape, an inverted trapezoidal shape, a rectangular shape, a semi-circular shape, or a semi-elliptical shape in cross section or partly has any one of these shapes in cross section.
5. The thin-film circuit device according to claim 1 , wherein the groove reaches the first protective layer.
6. An electronic apparatus comprising the thin-film circuit device according to claim 1 .
7. An electronic apparatus comprising the thin-film circuit device according to claim 5 .
8. The thin-film circuit device according to claim 1 , wherein the low-strength region has a mechanical strength less than that of the surroundings of the low-strength region.