Partially-oxidized cap layer for hard disk drive magnetic media
View Patent ↗A perpendicular recording magnetic media with a partially-oxidized cap layer combines a second oxide layer with a first cap layer to form the singular, partially-oxidized cap. The oxidized portion and the non-oxidized portion of the partially-oxidized layer are sputtered from a same target and have a same composition of metallic elements. The Ms of the oxidized portion is about twice as high as the non-oxidized portion. The oxidized portion has a thickness in the range of about 5 to 25 angstroms. The layer composition may comprise CoPtCrBTa, with a Cr at % of about 18-24%, Pt at about 13-20%, B at about 4-10%, and Ta at about 0-2%.
1. A magnetic media for a hard disk drive, comprising:
a substrate having a plurality of layers of material formed thereon, comprising
a soft underlayer (SUL), an exchange break layer (EBL), and an oxide layer;
a partially-oxidized cap layer comprising CoPtCrBTa on the oxide layer, and having an oxidized portion integrated with a non-oxidized cap portion to form a singular, partially-oxidized cap; and
a carbon overcoat (COC).
2. A magnetic media according to claim 1 , wherein the partially-oxidized cap layer comprises a Cr alloy, the EBL comprises a template layer of NiWCr and an Ru layer, the oxide layer comprises at least one oxide layer, and the oxidized portion is located below the non-oxidized cap portion.
3. A magnetic media according to claim 1 , further comprising a second cap layer on the partially-oxidized cap layer beneath the COC.
4. A magnetic media according to claim 1 , wherein the partially-oxidized cap layer comprises Cr at about 18-24 at %, Pt at about 13-20 at %, B at about 4-10 at %, and Ta at greater than 0 to about 2 at %.
5. A magnetic media according to claim 1 , wherein the partially-oxidized cap layer comprises Cr at about 19-21 at %, Pt at about 17-20 at %, B at about 6-8 at %, and Ta at greater than 0 to about 1 at %.
6. A magnetic media according to claim 1 , wherein the non-oxidized cap portion of the partially-oxidized cap layer is sputtered without oxygen and has a saturation magnetization (Ms) value of less than about 300 emu/cc, and the Ms value is about 400-500 emu/cc for the oxidized portion.
7. A magnetic media according to claim 6 , wherein the oxidized portion has an Ms value that is about 1.5-2 times greater than that of the non-oxidized cap portion.
8. A magnetic media according to claim 1 , wherein the oxidized portion of the partially-oxidized cap layer has a thickness of about 0.5-2.5 nm thick, and the non-oxidized cap portion of the partially-oxidized cap layer has a thickness of about 0.5-5 nm.
9. A magnetic media according to claim 1 , wherein the oxidized portion of the partially-oxidized cap layer has a thickness of about 1-2 nm thick, and the non-oxidized cap portion of the partially-oxidized cap layer has a thickness of about 3-4 nm.
10. A magnetic media according to claim 1 , wherein the oxidized and non-oxidized cap portions of the partially-oxidized cap layer are sputtered from a same target and have a same composition of metallic elements.
11. A magnetic media according to claim 1 , wherein the non-oxidized cap portion has an Ms value of about 250 emu/cc and, after the non-oxidized cap portion is oxidized, the Ms value is about 450 emu/cc.
12. A magnetic media according to claim 3 , wherein the second cap layer has a thickness of about 1 nm.
13. A magnetic media according to claim 1 , wherein the magnetic media is perpendicular magnetic recording media.
14. A hard disk drive, comprising:
a disk with perpendicular magnetic recording media for recording data, the disk being substantially planar and having a rotational axis;
an actuator having a magnetic read head and movable relative to the disk for reading data recorded on the disk; the disk further comprising:
a substrate having a plurality of layers of material formed thereon, comprising
a soft underlayer (SUL), an exchange break layer (EBL), and an oxide layer;
a partially-oxidized cap layer comprising CoPtCrBTa on the oxide layer, and having an oxidized portion integrated with a non-oxidized cap portion to form a singular, partially-oxidized cap; and
a carbon overcoat (COC).
15. A hard disk drive according to claim 14 , wherein the partially-oxidized cap layer comprises a Cr alloy, the EBL comprises a template layer of NiWCr and an Ru layer, the oxide layer comprises at least one oxide layer, and the oxidized portion is located below the non-oxidized cap portion.
16. A hard disk drive according to claim 14 , further comprising a second cap layer on the partially-oxidized cap layer beneath the COC.
17. A hard disk drive according to claim 14 , wherein the partially-oxidized cap layer comprises Cr at about 18-24 at %, Pt at about 13-20 at %, B at about 4-10 at %, and Ta at greater than 0 to about 2 at %.
18. A hard disk drive according to claim 14 , wherein the partially-oxidized cap layer comprises Cr at about 19-21 at %, Pt at about 17-20 at %, B at about 6-8 at %, and Ta at greater than 0 to about 1 at %.
19. A hard disk drive according to claim 14 , wherein the non-oxidized cap portion of the partially-oxidized cap layer is sputtered without oxygen and has a saturation magnetization (Ms) value of less than about 300 emu/cc, the Ms value is about 400-500 emu/cc for the oxidized portion.
20. A hard disk drive according to claim 14 , wherein the oxidized portion of the partially-oxidized cap layer has a thickness of about 0.5-2.5 nm thick, and the non-oxidized cap portion of the partially-oxidized cap layer has a thickness of about 0.5-5 nm.
21. A hard disk drive according to claim 14 , wherein the oxidized portion of the partially-oxidized cap layer has a thickness of about 1-2 nm thick, and the non-oxidized cap portion of the partially-oxidized cap layer has a thickness of about 3-4 nm.
22. A magnetic media according to claim 16 , wherein the non-oxidized cap portion has an Ms value of about 250 emu/cc and, after the non-oxidized cap portion is oxidized, the Ms value is about 450 emu/cc, and the second cap layer has a thickness of about 1 nm.
23. A method of fabricating magnetic media for a hard disk drive, comprising:
(a) providing a substrate;
(b) forming a plurality of layers on the substrate comprising a soft underlayer (SUL), an exchange break layer, and an oxide layer;
(c) forming a partially-oxidized cap layer comprising CoPtCrBTa and having an oxidized portion integrated with a non-oxidized cap portion to form a singular, partially-oxidized cap; and
(d) forming a carbon overcoat (COC) on the partially-oxidized cap layer.
24. A method according to claim 23 , wherein step (c) comprises flowing a mixture of argon and oxygen without sputtering to uniformly distribute oxygen and form the oxidized portion; after a delay, starting deposition; after another delay, terminating the flow of oxygen to complete the non-oxidized cap portion.
25. A method according to claim 23 , wherein step (c) comprises initially flowing inert gas and oxygen to grow the oxidized portion, stopping oxygen flow in a middle of film growth of the partially-oxidized cap layer, and continuing media deposition to complete the non-oxidized cap portion; and further comprising forming a second cap layer on the partially-oxidized cap layer at a thickness of about 1 nm with CoPt 18 Cr 13 B 7 , and 40 sccm of argon gas.
26. A hard disk drive, comprising:
a disk with perpendicular magnetic recording media for recording data, the disk being substantially planar and having a rotational axis;
an actuator having a magnetic read head and movable relative to the disk for reading data recorded on the disk; the disk further comprising:
a substrate having a plurality of layers of material formed thereon, comprising
a soft underlayer (SUL), an exchange break layer (EBL), and an oxide layer;
a partially-oxidized cap layer on the oxide layer, comprising an oxidized portion integrated with a non-oxidized cap portion to form a singular, partially-oxidized cap; and
a carbon overcoat (COC); and
the non-oxidized cap portion of the partially-oxidized cap layer is sputtered without oxygen and has a saturation magnetization (Ms) value of less than about 300 emu/cc, the Ms value is about 400-500 emu/cc for the oxidized portion.
27. A hard disk drive according to claim 26 , wherein the oxidized portion of the partially-oxidized cap layer has a thickness of about 0.5-2.5 nm thick, and the non-oxidized cap portion of the partially-oxidized cap layer has a thickness of about 0.5-5 nm.
28. A magnetic media according to claim 26 , wherein the partially-oxidized cap layer comprises CoPt 18 Cr 20 B 6 , the non-oxidized cap portion has an Ms value of about 250 emu/cc and, after the non-oxidized cap portion is oxidized, the Ms value is about 450 emu/cc, and having a second cap layer having a thickness of about 1 nm.