High-voltage-resistant MOS transistor and method for manufacturing the same
View Patent ↗A high-voltage-resistant MOS transistor having high electrical strength and a method for manufacturing the same, whereby to effectively decrease cost of manufacturing, are provided. The gate electrode includes a pair of separate opposition parts and a combination part sandwiched by the pair of opposition parts so that the opposition parts are opposed to each other so as not to overlap with the element region and the combination part overlaps with the element region. Each length of the opposition parts in a junction direction is longer than that of the combination part. The sidewall insulating film is formed so as to be continuous between the opposition parts and partially overlap with the element region. Therefore, the number of processes and a processing period for forming the MOS transistor can be decreased and uniformity of LDD lengths of the MOS transistors can be improved.
1. A MOS transistor comprising:
a first conductive type semiconductor substrate;
an element isolation oxide film formed in said semiconductor substrate;
an element region formed in said semiconductor substrate while being defined by said element isolation oxide film;
a gate oxide film formed over a surface of said element region;
a gate electrode formed on surfaces of said element isolation oxide film and said gate oxide film;
a sidewall insulating film formed so as to surround sidewalls of said gate electrode;
a pair of lightly doped diffusion regions having a second type of conductivity opposite to said first type of conductivity formed in said element region positioned beneath said sidewall insulating film, said lightly doped diffusion regions being opposed to each other via inner ends thereof; and
a pair of heavily doped diffusion regions having said second type of conductivity, said heavily doped diffusion regions being respectively connected to outer ends of said lightly doped diffusion regions and each having a conductivity higher than that of said lightly doped diffusion regions;
wherein
said gate electrode includes a pair of separate and elongated opposition parts and a connection part connecting said pair of opposition parts while said opposition parts are opposed to each other so as not to overlap said element region and said connection part overlaps said element region, and
said gate oxide film does not exist beneath the opposition parts.
2. A MOS transistor according to claim 1 ,
wherein said sidewall insulating film sandwiched by said opposition parts of said gate electrode is substantially flat and has substantially the same thickness as said gate electrode.
3. A MOS transistor according to claim 1 ,
wherein each of said opposition parts is substantially parallel to said junction direction, and
said connection part is sandwiched at each middle point of said opposition parts along said junction direction.
4. A MOS transistor according to claim 1 ,
wherein each length of said opposition parts in a junction direction of said heavily doped diffusion region and said lightly doped diffusion region is longer than a width of said connection part.
5. A MOS transistor according to claim 1 ,
wherein said lightly doped diffusion regions are formed through an ion implantation process using said gate electrode as a mask.
6. A MOS transistor according to claim 1 ,
wherein said highly doped diffusion regions are formed through an ion implantation process using sidewall insulating firm as a mask.