Plasma enhanced polymer ultra-thin multi-layer packaging
An implantable medical device including a plurality of components on a substrate, and a biocompatible multi-layer polymeric coating applied by vapor deposition to conform to and sealingly cover at least a portion of the components and/or the substrate. The coating is applied in at least two pairs of layers, wherein each pair has one layer formed by dissociation of a precursor and then simple deposition of that precursor, and the other layer is formed by at least one of plasma dissociation and excitation of the precursor to form a plasma-enhanced precursor, and then deposition of the plasma-enhanced precursor.
1. A method of making an implantable medical device comprising:
placing a plurality of components on a substrate; and
coating a biocompatible multi-layer polymeric applied by vapour deposition to conform to and sealingly cover at least a first portion of the components and the substrate, the coating being applied in at least two pairs of layers, wherein each pair has one layer formed by dissociation of a precursor and then simple deposition of that precursor, and the other layer is formed by at least one of plasma dissociation and excitation of the precursor to form a plasma-enhanced precursor, and then deposition of the plasma-enhanced precursor.
2. The method of making an implantable medical device of claim 1 wherein each layer differs in at least one diffusion barrier property from the other layer in the pair and adds to an overall barrier effect of the coating.
3. The method of making an implantable medical device of claim 1 wherein diffusion through each layer differs from that of the other layer in the pair.
4. The method of making an implantable medical device of claim 1 wherein a barrier property for the transport of impurities is dominated more by the interface between adjacent layers than by the thickness of each individual layer.
5. The method of making an implantable medical device of claim 1 wherein the precursor for at least one pair is selected from di-p-xylylene and halogenated derivatives thereof.
6. The method of making an implantable medical device of claim 5 wherein the precursor is dichloro-p-xylylene.
7. The method of making an implantable medical device of claim 1 wherein the components have at least a first three-dimensional portion, and the coating conforms to and sealingly covers at least the first portion of the components.
8. The method of making an implantable medical device of claim 7 wherein the multi-layer coating conforms to and sealingly covers at least substantially all of the components and the substrate.
9. A method of making an implantable medical device comprising:
placing a plurality of components on a substrate having at least a first three-dimensional portion; and
coating a biocompatible multi-layer polymeric applied by vapour deposition to conform to and sealingly cover at least a first portion of the components and the substrate, the coating being applied in at least two pairs of layers, wherein each pair has one layer formed by dissociation of a precursor and then simple deposition of that precursor, and the other layer is formed by at least one of plasma dissociation and excitation of the precursor to form a plasma-enhanced precursor, and then deposition of the plasma-enhanced precursor, wherein diffusion through each layer differs from that of the other layer in the pair, and the precursor for at least one pair is selected from di-p-xylylene and halogenated derivatives thereof.
10. The method of making an implantable medical device of claim 9 wherein the multi-layer coating conforms to and sealingly covers at least substantially all of the components and the substrate.
11. The method of making an implantable medical device of claim 10 wherein a barrier property for the transport of impurities is dominated more by the interface between adjacent layers than by the thickness of each individual layer.