IP Library Granted Patent US 8,367,244
Granted Patent B2
US 8,367,244 · App. 12/426,069 · Granted Feb 5, 2013

Anode material having a uniform metal-semiconductor alloy layer

Inventors: Murali Ramasubramanian (Fremont, CA); Robert M. Spotnitz (Pleasanton, CA)
Assignee: Enovix Corporation
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Quick Facts
Patent No.
US 8,367,244
App. No.
12/426,069
Granted
Feb 5, 2013
Kind
B2
Abstract

The present invention relates to methods for producing anode materials for use in nonaqueous electrolyte secondary batteries. In the present invention, a metal-semiconductor alloy layer is formed on an anode material by contacting a portion of the anode material with a solution containing metals ions and a dissolution component. When the anode material is contacted with the solution, the dissolution component dissolves a part of the semiconductor material in the anode material and deposit the metal on the anode material. After deposition, the anode material and metal are annealed to form a uniform metal-semiconductor alloy layer. The anode material of the present invention can be in a monolithic form or a particle form. When the anode material is in a particle form, the particulate anode material can be further shaped and sintered to agglomerate the particulate anode material.

Claims (29)

1. A method for forming an anode structure having a metal-semiconductor alloy layer, comprising the steps of:

obtaining a particulate anode material comprising a silicon or silicon alloy semiconductor material;

contacting the particulate anode material with a solution comprising metal ions and a dissolution component;

dissolving a part of the semiconductor material from the particulate anode material;

reducing the metal ions in the solution to the metal with electrons provided by the dissolution of the semiconductor material into the solution;

depositing the reduced metal on the particulate anode material to form a deposited reduced metal layer having a thickness of about 100 nanometers to about 3 micrometers;

annealing the particulate anode material to form a metal-semiconductor layer on the particulate anode material, the metal-semiconductor layer comprising an alloy of the reduced metal and the silicon or silicon alloy semiconductor material and having a thickness of about 100 nanometers to about 3 micrometers;

shaping the particulate anode material into an anode structure; and

sintering the anode structure to agglomerate the particulate anode material and form a sintered anode structure having a metal-semiconductor alloy layer.

2. The method of claim 1 , further comprising the step of etching the sintered anode structure.

3. The method of claim 1 , further comprising a step of annealing the particulate anode material and the deposited metal to form a metal-semiconductor alloy layer prior to shaping the particulate anode material.

4. The method of claim 1 , wherein a metal ion solution containing the metal ions and a displacement solution containing the dissolution component are pre-mixed to form the solution comprising the metal ions and the dissolution component before contacting the anode material.

5. The method of claim 4 , wherein the semiconductor material is silicon, the metal is nickel, and the dissolution component is fluoride.

6. The method of claim 4 , wherein the pre-mixed solution comprises about 0.02 to 0.5 M Ni 2+ and about 0.5 to 5 M fluoride.

7. The method of claim 4 , wherein the pre-mixed solution comprises about 0.02 to 0.5 M Ni 2+ and about 0.5 to 5 M peroxide.

8. The method of claim 4 , wherein the premixed solution is between about 50-98° C. during the contacting step.

9. The method of claim 4 , wherein the premixed solution has a pH between about 6 and 11.

10. The method of claim 1 , wherein the semiconductor is silicon.

11. The method of claim 1 , wherein the dissolution component is fluoride, chloride, peroxide, hydroxide, or permanganate.

12. The method of claim 11 , wherein the dissolution component is fluoride, or hydroxide.

13. The method of claim 1 , wherein the metal is a noble metal.

14. The method of claim 1 , wherein the metal is a base metal.

15. The method of claim 1 , wherein the metal is nickel.

16. The method of claim 1 wherein the particulate anode material is annealed to form a metal-semiconductor layer on the particulate anode material before the particulate anode material is sintered.

17. The method of claim 1 wherein the particulate anode material is annealed to form a metal-semiconductor layer on the particulate anode material before the particulate anode material is shaped to form the anode structure.

18. The method of claim 1 wherein the particulate anode material is annealed to form a metal-semiconductor layer on the particulate anode material after the particulate anode material is shaped to form the anode structure.

19. The method of claim 1 wherein the semiconductor material is silicon, the metal is nickel, the metal-semiconductor alloy is nickel silicide and the particulate anode material is annealed to form a metal-semiconductor layer on the particulate anode material before the particulate anode material is sintered.

20. The method of claim 1 wherein the particulate anode material is annealed at a temperature of about 500° C. to form the metal-semiconductor layer on the particulate anode material.

21. The method of claim 1 wherein the anode structure is sintered at a temperature of about 1,000° C.

Assignments (7)
MERGER AND CHANGE OF NAME Recorded Jan 19, 2023
From: ENOVIX OPERATIONS INC.; ENOVIX CORPORATION
To: ENOVIX CORPORATION
Reel/Frame 062434/0809 →
MERGER AND CHANGE OF NAME Recorded Jan 5, 2022
From: RSVAC MERGER SUB INC.; ENOVIX CORPORATION; ENOVIX OPERATIONS INC.
To: ENOVIX OPERATIONS INC.
Reel/Frame 058646/0894 →
TERMINATION OF SECURED OPTION AGREEMENT Recorded Feb 5, 2021
From: YORK DISTRESSED ESSET FUND III, L.P.; RODGERS MASSEY REVOCABLE LIVING TRUST DTD 4/4/11, THURMAN JOHN RODGERS, TRUSTEE; PETRICK, MICHAEL; EDDY ZERVIGON REVOCABLE TRUST U/A DATED FEBRUARY 16, 2010 - EDDY ZERVIGON AS TRUSTEE; SABOUNGHI, EDGAR; GCHINVESTMENTS,LLC; SHERMAN, JOEL, DR.; THE OBERST FAMILY TRUST, DATED 12/7/2005; GREENBERGER, MARC; JEROME INVESTMENTS, LLC; MCGOVERN, BRIAN; DPIP PROJECT LION SERIES; TUNE HOUSE CAPITAL I LLC; DCM V, L.P.
To: ENOVIX CORPORATION
Reel/Frame 055229/0544 →
SECOND AMENDMENT TO SECURED OPTION AGREEMENT Recorded Jan 7, 2019
From: ENOVIX CORPORATION
To: YORK DISTRESSED ASSET FUND III, L.P.; RODGERS MASSEY REVOCABLE LIVING TRUST DTD 4/4/11, THURMAN JOHN RODGERS, TRUSTEE; MICHAEL PETRICK; EDDY ZERVIGON REVOCABLE TRUST U/A DATED FEBRUARY 16, 2010 - EDDY ZERVIGON AS TRUSTEE; EDGAR SABOUNGHI; GCH INVESTMENTS, LLC; DR. JOEL SHERMAN; THE OBERST FAMILY TRUST, DATED 12/7/2005; MARC GREENBERGER; JEROME INVESTMENTS, LLC; BRIAN MCGOVERN; DPIP PROJECT LION SERIES; TUNE HOUSE CAPITAL I LLC; DCM V, L.P.
Reel/Frame 048432/0300 →
FIRST AMENDMENT TO SECURED OPTION AGREEMENT Recorded Dec 6, 2018
From: ENOVIX CORPORATION
To: YORK DISTRESSED ASSET FUND III, L.P.; RODGERS MASSEY REVOCABLE LIVING TRUST DTD 4/4/11, THURMAN JOHN RODGERS, TRUSTEE; PETRICK, MICHAEL; EDDY ZERVIGON REVOCABLE TRUST U/A DATED FEBRUARY 16, 2010 -EDDY ZERVIGON AS TRUSTEE; SABOUNGHI, EDGAR; GCH INVESTMENTS, LLC; SHERMAN, JOEL, DR.; THE OBERST FAMILY TRUST, DATED 12/7/2005; GREENBERGER, MARC; JEROME INVESTMENTS, LLC; MCGOVERN, BRIAN; DPIP PROJECT LION SERIES; TUNE HOUSE CAPITAL I LLC
Reel/Frame 047733/0685 →
SECURED OPTION AGREEMENT Recorded Oct 29, 2018
From: ENOVIX CORPORATION
To: YORK DISTRESSED ASSET FUND III, L.P.; RODGERS MASSEY REVOCABLE LIVING TRUST DTD 4/4/11, THURMAN JOHN RODGERS, TRUSTEE; PETRICK, MICHAEL; EDDY ZERVIGON REVOCABLE TRUST U/A DATED FEBRUARY 16, 2010 -EDDY ZERVIGON AS TRUSTEE; SABOUNGHI, EDGAR; GCH INVESTMENTS, LLC; SHERMAN, JOEL, DR.; THE OBERST FAMILY TRUST, DATED 12/7/2005; GREENBERGER, MARC; JEROME INVESTMENTS, LLC; MCGOVERN, BRIAN; DPIP PROJECT LION SERIES
Reel/Frame 047348/0007 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 28, 2010
From: RAMASUBRAMANIAN, MURALI; SPOTNITZ, ROBERT M.
To: ENOVIX CORPORATION
Reel/Frame 024455/0659 →
Continuity (3)
Continuation In Part 12105090 · Apr 17, 2008
Provisional Application 61045886 · Apr 17, 2008
Related Publication 20090263716A1 · Oct 22, 2009