Sputtering cathode having a non-bonded semiconducting target
View Patent ↗A sputtering cathode is generally provided. The sputtering cathode can include a semiconducting target (e.g., a cadmium sulfide target, a cadmium tin oxide target, etc.) defining a sputtering surface and a back surface opposite to the sputtering surface. A backing plate can be positioned facing the back surface of the target and non-bonded to the back surface of the target. A non-bonding attachment mechanism can removably hold the target within the sputtering cathode such that the back surface is facing the backing plate during sputtering.
1. A sputtering cathode, comprising:
a removable target defining a sputtering surface and a back surface, wherein the back surface is opposite the sputtering surface, and wherein the target comprises a semiconducting material;
a backing plate positioned facing the back surface of the target and non-bonded to the back surface of the target, wherein a gap exists between the back surface of the target and the backing plate; and,
a non-bonding attachment mechanism removably holding the removable target within the sputtering cathode such that the back surface is facing the backing plate during sputtering, wherein the non-bonding attachment mechanism comprises: a first bracket positioned along a first edge of the sputtering surface to overlap a portion of the sputtering surface, and a second bracket positioned along a second edge of the sputtering surface to overlap a portion of the sputtering surface; and
a biasing member between the backing plate and the target to push the target against the first bracket and the second bracket.
2. The sputtering cathode of claim 1 , wherein the sputtering surface of the target has a sputtering temperature during sputtering, the sputtering cathode further comprising:
a temperature sensor positioned to measure the temperature of the sputtering surface of the target.
3. The sputtering cathode of claim 1 , further comprising:
a heating element positioned on the backing plate to provide thermal energy to the target.
4. The sputtering cathode of claim 3 , wherein the heating element is positioned within the back plate.
5. The sputtering cathode of claim 1 , further comprising:
a spacer positioned between the back surface of the target and the backing plate to separate the target from the backing plate to define the gap.
6. The sputtering cathode of claim 1 , further comprising:
a first dark space shield positioned to protect the first bracket from being sputtered; and,
a second dark space shield positioned to protect the second bracket from being sputtered.
7. The sputtering cathode of claim 6 , wherein the sputtering surface of the target has a sputtering temperature during sputtering, the sputtering cathode further comprising:
a temperature sensor positioned on a back surface of the first dark space shield and positioned to monitor the sputtering temperature of the sputtering surface of the target.
8. The sputtering cathode of claim 1 , further comprising:
a first spacer connected to the first bracket and positioned between the back surface of the target and the backing plate; and,
a second spacer connected to the second bracket and positioned between the back surface of the target and the backing plate.
9. The sputtering cathode of claim 1 , wherein a first overhang flange extends from the first bracket and overlaps a first portion of the sputtering surface of the target, and wherein a second overhang flange extends from the second bracket and overlaps a second portion of the sputtering surface of the target, wherein each of the first and second overhang flanges extend over about 0.5% to about 5% of the sputtering surface extending from a first edge and second edge of the target, respectively.
10. The sputtering cathode of claim 1 , wherein the first bracket, the second bracket, and the backing plate define a slide track for removably receiving a plurality of targets therebetween.
11. The sputtering cathode of claim 10 , further comprising:
a removable end bracket, wherein the removable end bracket secures the targets within the slide track during sputtering and allows for replacement of the targets upon depletion.
12. The sputtering cathode of claim 1 , wherein the sputtering cathode defines a first slide track and a second slide track positioned substantially parallel to each other.
13. The sputtering cathode of claim 12 , further comprising:
a middle barrier positioned between the first slide track and second slide track.
14. The sputtering cathode of claim 13 , wherein the middle barrier defines a third overhang flange and a fourth overhang flange, such that the first track is defined between a first overhang flange extending from the first bracket and the third overhang flange of the middle barrier and the second track is defined between a second overhang flange extending from the second bracket and the fourth overhang flange of the middle barrier.
15. The sputtering cathode of claim 1 , wherein the first and second brackets are constructed of a non-magnetic material.
16. The sputtering cathode of claim 1 , wherein the target comprises cadmium sulfide.
17. A sputtering cathode, comprising:
a removable target defining a sputtering surface and a back surface, wherein the back surface is opposite the sputtering surface, and wherein the target comprises a semiconducting material;
a backing plate positioned facing the back surface of the target and non-bonded to the back surface of the target;
a non-bonding attachment mechanism removably holding the removable target within the sputtering cathode such that the back surface is facing the backing plate during sputtering , wherein the non-bonding attachment mechanism comprises: a first bracket positioned along a first edge of the sputtering surface to overlap a portion of the sputtering surface; and, a second bracket positioned along a second edge of the sputtering surface to overlap a portion of the sputtering surface; and
a biasing member between the backing plate and the target to push the target against the first bracket and the second bracket.